Investigation of a tin liquid metal ion source

Bischoff, L.; Akhmadaliev, Ch.; Mair, A. W. R.; Mair, G L R; Ganetsos, Theodore; Aidinis, C. J.

doi:10.1007/s00339-004-2598-x

Cited by 8 publications

(6 citation statements)

References 15 publications

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“…The flexibility of single particle on-the-fly analysis allows the Aerosol Impact Spectrometer to function with a wide range of nanoparticle masses and charges from a given particle source. Additionally, the variable energy selection of the spectrometer allows a variety of particle sources to be implemented in addition to the demonstrated electrospray ionization, including liquid metal ion sources [54][55][56] and needle-charge dust sources [57,58]. The wide range of final energies achievable with the variable linear accelerator/decelerator will allow for a variety of scattering experiments to be performed to examine both hypo-and hypervelocity impact phenomena Submit your manuscript to a journal and benefi t from:…”

Section: Discussionmentioning

confidence: 99%

The aerosol impact spectrometer: a versatile platform for studying the velocity dependence of nanoparticle-surface impact phenomena

2017

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A new apparatus designed to accelerate/decelerate and study the surface impact phenomena of charged aerosols and nanoparticles over a wide range of mass-tocharge (m/z) ratios and final velocities is described. A nanoparticle ion source coupled with a linear electrostatic trap configured as an image charge detection (ICD) mass spectrometer allows determination of the mass-to-charge ratio and the absolute charge and mass of single nanoparticles. A nine-stage linear accelerator/ decelerator is used to fix the final velocity of the nanoparticles, and in the results reported here the coefficient of restitution for polystyrene latex spheres (PSLs) impacting on silicon is measured using ICD techniques. To enable this apparatus to study a wide range of m/z, the data acquisition system uses a transient digitizer interfaced to a field-programmable gate array module that allows real time calculation of m/z and determination of the pulse sequence for the linear accelerator/decelerator. Electrospray ionization of a colloidal suspension of PSL spheres of 510 and 990 nm has been used to demonstrate acceleration and deceleration of charged nanoparticles and the resolution of the apparatus. Measurements of the coefficient of restitution for PSLs on silicon over the range 10-400 m/s are consistent with previous studies.

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Section: Discussionmentioning

confidence: 99%

The aerosol impact spectrometer: a versatile platform for studying the velocity dependence of nanoparticle-surface impact phenomena

2017

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“…19. 35. This plot demonstrates that at the surface the maximal atomic fraction of Co in Si introduced by ion implantation is limited to 33 %.…”

Section: Fib Assisted Synthesis Of New Solid-state Phasesmentioning

confidence: 84%

“…The utilization of these unique point-like sources in FIBs Energy spread of singly charged, doubly charged, and polyatomic ions (cluster) as a function of their mass-to-charge ratio obtained from alloy LMIS like AuGeSi, AuGe [30], AlCeC [31], ErFeNiCr [32], CoNd [33], GaBiLi [34] and from pure metal LMIS for Ga, Sn [35], and Bi [36] at a constant emission current of 15 μA with a diameter of less than 10 nm and current densities up to more than 20 A cm −2 opens a broad field of new applications. Possible other elemental metals and eutectic alloys, mostly investigated and tested in the own lab, are listed in Table 19.1.…”

Section: Liquid Alloy Ion Sources: Fundamentals and Applicationsmentioning

confidence: 99%

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Nanostructures by Mass-Separated FIB

Bischoff

Böttger

Philipp

et al. 2013

Lecture Notes in Nanoscale Science and Technology

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The introduction of mass-separated systems in the field of focused ion beams significantly increases the area of application in nanotechnology due to the availability of a broad spectrum of ions with the same advantages compared to classical Ga instruments. A short description of the configuration of a mass-separated FIB tool is given as well as the fundamentals of alloy liquid metal ion sources. Examples of application include patterned tailoring of functional surfaces and ioninduced phase transformation in thin layers, in particular the Si nanowire fabrication by FIB implantation and subsequent wet-chemical, anisotropic etching and the FIB lithography of thin ta-C films. Furthermore, the ion beam synthesis (IBS) of CoSi 2 nanostructures by Co-FIB writing and annealing, and the modification of surface morphology by various mono-and polyatomic projectiles in a broad energy and temperature range in different materials are described and discussed.

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“…A typical high-resolution spectrum from an ErFeNiCr alloy LMIS is shown in Fig. 4 [28]. It is to be seen that the doubly charged ions Er 2+ and Fe 2+ are the dominant species in the beam.…”

Section: Characterizationmentioning

confidence: 97%

Investigation of a tin liquid metal ion source

Cited by 8 publications

References 15 publications

The aerosol impact spectrometer: a versatile platform for studying the velocity dependence of nanoparticle-surface impact phenomena

The aerosol impact spectrometer: a versatile platform for studying the velocity dependence of nanoparticle-surface impact phenomena

Nanostructures by Mass-Separated FIB

Alloy liquid metal ion sources and their application in mass separated focused ion beams

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