Investigation of microfabrication of diamond-like film via focused ion beam milling

Abstract

Optical properties ͑transmission and refractive index͒ and chemical structure ͑x-ray photoelectron spectroscopy͒ of a diamond-like coating ͑DLC͒ before and after focused ion beam milling ͑FIBM͒ process were investigated in this article. We find no influence of FIBM on optical properties and chemical structure of the DLC in the near-infrared region. The film can be used for optical applications. As an application example, a diffractive optical element ͑DOE͒ was directly fabricated on the film by FIBM. The measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.

Fabrication of diamond-like carbon-based two-dimensional photonic crystals

“…Then, we attempted to fabricate a DLC-based 2-D photonic crystal slab structure. There have been a few reports of fabrication of DLC-based micro-optical elements using maskless techniques with a focused ion (Ga+) beam [17]. However, the ion implantation by gallium in the nanophotonic elements during the milling seriously influences the optical absorption of the material [18].…”

High quality laser milling of ceramics, dielectrics and metals using nanosecond and picosecond lasers

“…In this respect, not much work has been done using lasers for micromilling synthetic CVD diamond, which also suffers from laser-induced graphitisation, a clear disadvantage when considering subsequent electrical connections on thin film devices grown on diamond substrates. Other fabrication techniques such as focused ion beam milling 11 (FIBM) are commonly used but considered slow and complicated to setup. Figure 12 illustrates a successful example of a laser milled sensor mold on synthetic diamond using high peak power from the copper laser.…”

Application of Focused Ion Beam Micromachining: A Review

“…This may be improved by selecting the substrate material with high sputter yield. Beam current is another factor that limits the achievable aspect ratio but it is difficult to obtain a general relationship between the beam current and the aspect ratio since it is different for different substrates [13]. R a was found to be the most crucial factor in producing good surface quality of micrcomponents [14,15,16].…”