Investigation of radio frequency plasma for the growth of diamond like carbon films

Abstract

Growth mechanisms of ZnO(0001) investigated using the first-principles calculation J. Appl. Phys. 112, 064301 (2012) Generation of silver-anatase nanocomposite by excimer laser-assisted processing AIP Advances 2, 032171 (2012) Degradation and passivation of CuInSe2The radio frequency has been used to generate plasma of argon, acetylene gases, and their mixture should be replaced by mixture in a plasma enhanced chemical vapor deposition system. The generated plasma discharge has been characterized by an impedance analyzer (VI probe) for the evaluation of various electrical parameters of the plasma discharge such as rf-voltage, rf-current, phase, impedance, and actual power consumed by the plasma discharge. These plasma parameters have been analyzed as a function of self-bias, which are found to depend on applied power, pressure, and reactor geometry of the system. Subsequently, same plasma conditions were used for the deposition of diamond like carbon (DLC) films. The argon plasma has lowest impedance (16.02 X) value and highest average electron density (2.77 Â 10 10 cm À3 ) value at À150 V self-bias. X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy measurements have been performed on the prepared DLC films for the evaluation of the chemical bonding. XPS studies have been used for the evaluation of sp 3 and sp 2 contents. The film deposited at À150 V self-bias has the highest values of sp 3 content (60.97 at. %), band gap, nanohardness, elastic modulus, plastic index parameter, and elastic recovery, and the lowest value of sp 2 content (27.27 at. %) among the films chosen for the present investigation. These DLC films properties were found to be well correlating with the evaluated plasma parameters. V C 2012 American Institute of Physics. [http://dx.

Study of Chemical Polymerization of Polypyrrole with SDS Soft Template: Physical, Chemical, and Electrical Properties

“…The polaron peak that shifted to the left supported a highly oxidized chain of PPy. 32 As the Py concentration increased, the C−H deformation peak associated with the polarons shifted from 1050 to 1060 cm −1 . This shift indicated an increase in the oxidative degree of PPy.…”

“…This shift indicated an increase in the oxidative degree of PPy. 32 Additionally, with an increased Py concentration, a C−H deformation peak of the bipolarons emerged and was enhanced at 1083 cm −1 . The C−C ring stretching remained constant for the polarons (1340−1342 cm −1 ) and moved to the left (from 1387 to 1379 cm −1 ) in the case of the bipolarons.…”

Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma

“…Therefore, it is difficult to understand the fundamental cause of the surface morphology and roughness evolutions in the GDP film growth with a simple adjustment of the deposition parameters. In order to optimize the deposition parameters and obtain high quality films, diagnosing the plasma characteristics seems necessary [8]. Recently, Peter et al have compared five different hydrocarbon precursors in a-C:H film growth [9].…”

A review of plasma-assisted deposition methods for amorphous carbon thin and ultrathin films with a focus on the cathodic vacuum arc technique

“…The system is then pumped down to remove any adsorbents from the chamber walls before introducing the precursor gas in the chamber. Among various precursor hydrocarbon (C x H y ) gases used to synthesize a-C:H films, the most commonly used are acetylene [110,140,[169][170][171][172], methane [173][174][175][176], ethylene [112,177], and benzene [175]. To enhance the dissociation of the hydrocarbon gas, a diluting carrier gas (e.g., hydrogen) may be incorporated in the gas mixture; however, hydrogen dilution can affect the hydrogen content of the film.…”