Investigation of Static and Dynamic Characteristics of an Electrostatically Actuated Rectangular Microplate with Axial Internal Stress and Transverse Pressure

Kumar, Shivdayal; Bhushan, Anand

doi:10.1007/s42417-022-00602-z

Cited by 6 publications

(2 citation statements)

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“…In-plane internal stresses induced by the electrothermal heating [19,20] or optical means [4] can be used as a tuning parameter to tune the bi-stability characteristics of microbeam/plate based N/ MEMS devices [4,7]. Whereas the in-plane internal stresses induced as fabrication defect or due to working temperature variations, affect the output results of the N/MEMS based devices [18,21]. Presence of residual stresses [18,22] and transverse load [21,23] significantly change the normal voltage-deflection equilibrium path and hence bi-stabile characteristics of electrostatically actuated microplates/beams changes.…”

Section: Introductionmentioning

confidence: 99%

“…Whereas the in-plane internal stresses induced as fabrication defect or due to working temperature variations, affect the output results of the N/MEMS based devices [18,21]. Presence of residual stresses [18,22] and transverse load [21,23] significantly change the normal voltage-deflection equilibrium path and hence bi-stabile characteristics of electrostatically actuated microplates/beams changes.…”

Section: Introductionmentioning

confidence: 99%

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Interaction of transverse pressure and in-plane internal stresses on bi-stability of electrostatically rectangular microplates

Kumar

Bhushan

2022

Eng. Res. Express

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Bi-stability behavior is commonly observed in an electrostatically actuated pressurised or initially curved microplates. Additionally, presence of in-plane internal stresses considerably changes the mechanical behaviour of the electrostatically actuated microplate. In this paper, the effects of in-plane internal stresses on bi-stability criteria of pressurised rectangular microplates are investigated. For this, the governing di erential equation of motion of a rectangular plate is derived using Kirchhoff's plate theory including von Karman's nonlinearity, transverse pressure, axial in-plane internal stresses, and non-linear electrostatic actuation force. Further, Galerkin's based reduced-order modelling technique is applied to solve the equation. The problem has been solved for two different sets of plate boundary conditions: simply supported and clamped. The analysis reveals that the presence of tensile or compressive in-plane internal stresses signi cantly changes the transverse pressure range for the occurrence of bi-stability on the voltage-defection equilibrium path. Further, we have investigated the variation of required threshold gap between microplate and substrate for bi-stability in presence of in-plane internal stresses. Results of this investigation can be used to design more e cient microplate based bi-stable N/MEMS devices.

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