vices. It is known that LT-GaN exhibits an ultrahigh resistivity, which cannot be reduced even with thermal annealing. Such a semi-insulating property makes LT GaN suitable to serve as the top layer of MSM photodetectors. By depositing a LT-GaN layer on top of an n-GaN layer, we should be able to achieve a high Schottky-barrier height at the metal/ semiconductor interface, reduce leakage current, and thus, improve the performance of a GaN-based MSM photodetector.The GaN samples used in this study were all epitaxially grown on c-face sapphire substrates by metal-organic chemical vapor deposition. 11-29 Trimethylgallium (TMGa) and ammonia (NH 3 ) were used as the source materials of Ga and nitrogen, respectively. After annealing the sapphire substrate at 1,100°C in an H 2 ambient to remove surface contamination, a 30-nm-thick LT-GaN nucleation layer was deposited onto the sapphire substrate at 550°C. It should be noted that measured resistivity of the LT GaN was larger than 10 9 ⍀/ٗ, which is the detection limit of our instrument. The temperature was then raised to 1,050°C to grow a 2-m-thick, high-temperature (HT) GaN-epitaxial layer. Typical room-temperature carrier concentration of this HT GaN-epitaxial layer was ϳ2 ϫ 10 16 /cm 3 . A 30-nmthick, LT-GaN top layer was then grown on top of the HT GaN at 550°C (sample A). For comparison, samples without the LT-GaN top layers were alsoThe GaN metal-semiconductor-metal (MSM) ultraviolet (UV) photodetectors with a low-temperature (LT)-GaN layer have been demonstrated. It was found that we could achieve a two orders of magnitude smaller, photodetector-dark current by introducing a LT-GaN layer, which could be attributed to the larger Schottky-barrier height between the Ni/Au metal contact and the LT-GaN layer. It was also found that photodetectors with the LT-GaN layer could provide a larger photocurrent to dark-current contrast ratio and a larger UV-tovisible rejection ratio. The maximum responsivity was found to be 3.3 A/W and 0.13 A/W when the photodetector with a LT-GaN layer was biased at 5 V and 1 V, respectively.