2020
DOI: 10.4028/www.scientific.net/msf.1006.239
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Investigation of the Gas Sensitive Properties of Tin Dioxide Films Obtained by Magnetron Sputtering

Abstract: In an article, studies of tin dioxide films for challenging sensitive elements of gas sensors for monitoring gaseous impurities in air have been described. The technological influence issues parameters of the process producing of tin dioxide films by magnetron sputtering at a fixed magnetron power on their crystal structure and phase composition were considered. The substrate temperature, layer thickness, and oxygen concentration in the atomized gas were considered as parameters. The foundation for improving t… Show more

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Cited by 7 publications
(1 citation statement)
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“…Increasing the operational durability of the deposited power and petrochemical equipment requires improving the recovery technology, since the destruction of the deposited layer and, accordingly, the product as a whole, can be initiated by defects formed in the near-weld zone during its crystallization or appearing during operation [1,2]. Despite a large number of studies in this direction, a significant part of them is devoted to the operating conditions and characteristics of the coatings regardless of the method of its application, for example [3].…”
Section: Introductionmentioning
confidence: 99%
“…Increasing the operational durability of the deposited power and petrochemical equipment requires improving the recovery technology, since the destruction of the deposited layer and, accordingly, the product as a whole, can be initiated by defects formed in the near-weld zone during its crystallization or appearing during operation [1,2]. Despite a large number of studies in this direction, a significant part of them is devoted to the operating conditions and characteristics of the coatings regardless of the method of its application, for example [3].…”
Section: Introductionmentioning
confidence: 99%