2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT) 2010
DOI: 10.1109/iemt.2010.5746663
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Investigations of the effects of blade type, dicing tape, blade preparation and process parameters on 55nm node low-k wafer

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“…tape. The cause of the defects was a combining effect of tape thickness, base film material type, and adhesion strength [3], so prior to data collection, optimized process parameters were selected for each tape per its properties.…”
Section: Figure 3: Die Chipping Defects By Mil-std-883ementioning
confidence: 99%
“…tape. The cause of the defects was a combining effect of tape thickness, base film material type, and adhesion strength [3], so prior to data collection, optimized process parameters were selected for each tape per its properties.…”
Section: Figure 3: Die Chipping Defects By Mil-std-883ementioning
confidence: 99%