Ion-beam-assisted deposition of magnetron-sputtered metal nitrides

Bäther, K.‐H.; Herrmann, U.; Schröer, A.

doi:10.1016/0257-8972(95)08277-8

Cited by 9 publications

(3 citation statements)

References 11 publications

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“…The limitations of ion-beam-assisted deposition are relatively high cost and line-of-sight [89]. When ions are reactive, compounds such as TiN, Si3N4, and BN can be synthesized at fairly low temperatures [90][91][92]. Thin films of varying stoichiometry or functionally graded thin films can also be produced by adjusting the ratio of reactive ions to atoms reaching the substrate surface [93].…”

Section: Physical Vapor Depositionmentioning

confidence: 99%

“…One of the rationales behind IBED CrN thin film coating technique for improving fretting fatigue resistance making it superior compared to CrN film by PVD is likely attributed to the generation of a comparatively dense and fine structure due to ion beam bombardment throughout the IBED process [86,87]. The high adhesion strength of IBED films to the substrate is another potential explanation for the higher fretting fatigue resistance [88,90,91]. Under high normal load and very small slip amplitude, long cracks are generated on the surface of the fretting scar on IBED CrN films, representing fretting fatigue failure [110].…”

Section: Ibed Techniquementioning

confidence: 99%

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A Study on Surface Modification of Al7075-T6 Alloy against Fretting Fatigue Phenomenon

Mohseni

Zalnezhad

Sarhan

et al. 2014

Advances in Materials Science and Engineering

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Aircraft engines, fuselage, automobile parts, and energy saving strategies in general have promoted the interest and research in the field of lightweight materials, typically on alloys based on aluminum. Aluminum alloy itself does not have suitable wear resistance; therefore, it is necessary to enhance surface properties for practical applications, particularly when aluminum is in contact with other parts. Fretting fatigue phenomenon occurs when two surfaces are in contact with each other and one or both parts are subjected to cyclic load. Fretting drastically decreases the fatigue life of materials. Therefore, investigating the fretting fatigue life of materials is an important subject. Applying surface modification methods is anticipated to be a supreme solution to gradually decreasing fretting damage. In this paper, the authors would like to review methods employed so far to diminish the effect of fretting on the fatigue life of Al7075-T6 alloy. The methods include deep rolling, shot peening, laser shock peening, and thin film hard coatings. The surface coatings techniques are comprising physical vapor deposition (PVD), hard anodizing, ion-beam-enhanced deposition (IBED), and nitriding.

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Section: Physical Vapor Depositionmentioning

confidence: 99%

Section: Ibed Techniquementioning

confidence: 99%

A Study on Surface Modification of Al7075-T6 Alloy against Fretting Fatigue Phenomenon

Mohseni

Zalnezhad

Sarhan

et al. 2014

Advances in Materials Science and Engineering

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show abstract

“…[4][5][6][7][8][9][10] Some of these studies also report on the stoichiometry of the films using techniques such as X-ray diffraction and show that the nitrogen partial pressure during processing has a profound effect on the metal to nitrogen ratio in the films. The mechanical properties, electrical conductivity and superconducting properties are in turn a strong function of the nitrogen partial pressure deposition.…”

Section: Introductionmentioning

confidence: 99%

Optical and Electrical Properties of Vanadium Nitride Thin Films

Krishna

Bhattacharya

1999

Int. J. Mod. Phys. B

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Vanadium nitride thin films have been deposited on to quartz substrates by dc magnetron sputtering at two different total pressures and a series of nitrogen partial pressures. The spectral transmittance of these films, in the region 350 to 1500 nm, is strongly dependent on the nitrogen partial pressure during sputtering and relatively insensitive to total pressure. The films became more transparent as the nitrogen partial pressure was decreased at a constant total pressure. The optical constants, refractive index and extinction coefficient, exhibited a similar dependence on the nitrogen partial pressure. The sheet resistivity of the films decreased with increasing nitrogen partial pressure. The values of resistivity indicate that the films are semiconducting rather than metalic. * Corresponding author. 833 Int. J. Mod. Phys. B 1999.13:833-839. Downloaded from www.worldscientific.com by UNIVERSITY OF CALIFORNIA @ SAN DIEGO on 04/13/15. For personal use only.

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Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity

Wang

Huang

et al. 2013

Journal of Non-Crystalline Solids

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Ion-beam-assisted deposition of magnetron-sputtered metal nitrides

Cited by 9 publications

References 11 publications

A Study on Surface Modification of Al7075-T6 Alloy against Fretting Fatigue Phenomenon

A Study on Surface Modification of Al7075-T6 Alloy against Fretting Fatigue Phenomenon

Optical and Electrical Properties of Vanadium Nitride Thin Films

Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity

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