2004
DOI: 10.1016/j.surfcoat.2003.09.004
|View full text |Cite
|
Sign up to set email alerts
|

Ion beam sputter coating of three-dimensional objects: rings, cylinders, and tubes

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2007
2007
2015
2015

Publication Types

Select...
5
1

Relationship

0
6

Authors

Journals

citations
Cited by 7 publications
(2 citation statements)
references
References 7 publications
0
2
0
Order By: Relevance
“…For a multilayer coating, however, a change in sputter target would be required. In earlier work, similar techniques have been used to coat other three-dimensional objects, including the inner walls of cylinders and tubes [10,11,12]. In this case, the sputter target, either a cone or a rotating ellipse, had been introduced into the hollow sample, giving uniform coatings for corrosion or wear protection.…”
Section: Discussionmentioning
confidence: 99%
“…For a multilayer coating, however, a change in sputter target would be required. In earlier work, similar techniques have been used to coat other three-dimensional objects, including the inner walls of cylinders and tubes [10,11,12]. In this case, the sputter target, either a cone or a rotating ellipse, had been introduced into the hollow sample, giving uniform coatings for corrosion or wear protection.…”
Section: Discussionmentioning
confidence: 99%
“…A conical sputter target can, for example, be moved along the central axis of a tube by simultaneous ion bombardment to coat the inner walls of tubes having inner diameters between 8 and 21 mm [1][2][3].…”
Section: Introductionmentioning
confidence: 99%