2006
DOI: 10.1016/j.apsusc.2005.11.071
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Ion implantation induced by Cu ablation at high laser fluence

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Cited by 12 publications
(2 citation statements)
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“…It makes it possible to evaluate the ion implanted fluence for a single laser shot or as a function of the laser irradiation time by using high repetitive laser pulses. Multi-species ion implantation and multi-energy ion implants are useful for the modification of the chemical and physical properties of surface layers and for the generation of the high adhesion of thin films with different substrates [5]. A comparison between the ion energy measurements obtained online with Time-Of-Flight (TOF) techniques and Rutherford Backscattering Spectrometry (RBS) measurements of the ion depth distribution in implanted substrate obtained by using 2 MeV He + ions is presented [6].…”
Section: Introductionmentioning
confidence: 99%
“…It makes it possible to evaluate the ion implanted fluence for a single laser shot or as a function of the laser irradiation time by using high repetitive laser pulses. Multi-species ion implantation and multi-energy ion implants are useful for the modification of the chemical and physical properties of surface layers and for the generation of the high adhesion of thin films with different substrates [5]. A comparison between the ion energy measurements obtained online with Time-Of-Flight (TOF) techniques and Rutherford Backscattering Spectrometry (RBS) measurements of the ion depth distribution in implanted substrate obtained by using 2 MeV He + ions is presented [6].…”
Section: Introductionmentioning
confidence: 99%
“…The direct ion implantation of multi species and multi energetic ions which penetrate at different depths, as well as the high-ion current density are useful to modify many chemical and physical properties of surface layers, such as hardness, roughness, wet-ability, chemical inertless, and to generate high adhesion of thin films with different substrates [2]. Recently, the remarkable enhancements exhibited over a wide number of experiments were due to more knowledge on the laser parameters and target composition and geometry.…”
mentioning
confidence: 99%