1992
DOI: 10.1143/jjap.31.999
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Ionized Cluster Beam Deposition of Polycrystalline Thin Films of CuInSe2

Abstract: We studied the interaction between hydrogen and point defects generated by electron irradiation of Si by means of optical absorption measurement. Specimens were prepared from n-type Si crystals. Those specimens were doped with hydrogen by annealing in a hydrogen atmosphere at 1200 • C followed by quenching and were subsequently irradiated with 3 MV electrons at room temperature. We observed their optical absorption spectra at about 6 K with a resolution of 0.25 cm −1 . Many optical absorption peaks were observ… Show more

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Cited by 12 publications
(7 citation statements)
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“…In addition, CuInS is a candidate for the cathode material of photochemical devices owing to its high performance and high output stability (6). CuInS can be synthesized by a variety of methods such as solid-state reaction at elevated temperature (7), electrodeposition (8), spray pyrolysis (9), sputtering (10), multi-and single source chemical vapor deposition (CVD) (11), and ionized cluster beam technique (12). However, these methods require either very high temperature (typically 600}9003C), high pressure, or special apparatus.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, CuInS is a candidate for the cathode material of photochemical devices owing to its high performance and high output stability (6). CuInS can be synthesized by a variety of methods such as solid-state reaction at elevated temperature (7), electrodeposition (8), spray pyrolysis (9), sputtering (10), multi-and single source chemical vapor deposition (CVD) (11), and ionized cluster beam technique (12). However, these methods require either very high temperature (typically 600}9003C), high pressure, or special apparatus.…”
Section: Introductionmentioning
confidence: 99%
“…The XRD patterns of the samples showed the typical chalcopyrite pattern, and clear peaks from (11 2), (2 0 4)/ (2 2 0), (3 1 2)/(11 6) planes were observed. The films were preferentially oriented toward (11 2) plane, and the peaks attributed to hetero-phase such as Cu x Se were not observed except the spectrum for 550 1C which has small Cu x Se-phase near the (11 2) peak [9]. The orientation of each spectrum was almost identical to the film grown by the three-stage process grown with normal Se at the same growth temperature.…”
Section: Resultsmentioning
confidence: 83%
“…The pioneer works to enhance activity of source atoms during evaporation were carried out by using an ionized cluster beam (ICB) deposition technique [7,8], and CuInSe2 films were grown at a low substrate temperature of 300 o C. In this paper, we have grown CuGaSe2 (CGS) films by a co-evaporation system with ionized Ga precursors. Structural properties of CGS films were evaluated by X-ray diffraction (XRD), scanning electron microscope (SEM) and Raman spectroscopy.…”
Section: Introductionmentioning
confidence: 99%