Large-strain, piezoelectric, in-plane micro-actuator

Conway, Nicholas J; Kim, Sung Hoon

doi:10.1109/mems.2004.1290620

Cited by 36 publications

(14 citation statements)

References 8 publications

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“…Piezoelectric thin films actuators are limited by the small strain of the piezoelectric material, which is in the range of 0.1%. In addition, for piezoelectric thin film mechanisms, the obtained actuation force is less than 1 mN [29]. Electrostatic actuators typically provide a small work per volume [1] and to provide actuation forces greater than 1 mN, the overall device dimensions must be very large, e.g., 87 μN mm −2 at 33 V in [30] (see also references therein).…”

Section: Discussionmentioning

confidence: 99%

A novel shape memory alloy microactuator for large in-plane strokes and forces

Kabla

Ben-David

Shilo

2016

Smart Mater. Struct.

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This paper describes a novel concept for in-plane actuators based on a thin free-standing shape memory alloy (SMA) film. The presented guidelines can be used to design a variety of actuators that can provide a combination of large strokes and forces for linear and rotary motions. A prototype actuator demonstrated a displacement of 45 μm related to 4.5% of the SMA film length, and a force of up to 115 mN related to a stress of 230 MPa in the SMA film without plastic deformations. These capabilities allow the actuator to work against the stiff springs that are essential for the devices' ability to sustain vibrations, impacts, and accelerations.

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Section: Discussionmentioning

confidence: 99%

A novel shape memory alloy microactuator for large in-plane strokes and forces

Kabla

Ben-David

Shilo

2016

Smart Mater. Struct.

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“…There are series of novel actuating techniques available to drive the microgripper but piezoelectric actuator has gained its high reputation due to some indispensable attributes for achieving high precision manipulation of microdevices. This include a large force to weight ratio, fast response time, large bandwidth, zero backlash and stick/slip effect, low input power, unlimited motion resolution and possesses the compatibility with variety of prototype designs [27][28][29]. Extensive researches on piezoelectric actuator over the years particularly on the aspect of developing advanced control strategies to reduce the hysterisis effect have also broaden the application of this actuator in micromanipulation field [30][31][32].…”

Section: Motivationmentioning

confidence: 99%

Development of a novel flexure-based microgripper for high precision micro-object manipulation

Zubir

Shirinzadeh

Tian

2009

Sensors and Actuators A: Physical

152

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“…The total spring constants for latches are straightforward and can be easily calculated using beam deflecting formulas. For the drive part, a bent-beam spring model should be used [23]- [26]. The bent-beam deflection which will correspond to Drive movement (Fig.…”

Section: A Pull-inmentioning

confidence: 99%

A Low-Voltage Large-Displacement Large-Force Inchworm Actuator

Erismis

Neves²,

Puers³

et al. 2008

J. Microelectromech. Syst.

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Inchworm microactuators are popular in micropositioning applications for their long ranges. However, until now, they could not be considered for applications such as in vivo biomedical applications because of their high input voltages. This paper reports on the modeling, design, fabrication, and testing of a new family of pull-in-based electrostatic inchworm microactuators which provides a solution to this problem. Actuators with only 7-V operating voltage are achieved with a ±18-μm total range and a ±30-μN output force. Larger operating voltage (16 V) actuators show even better results in force (±110 μN) and range (±35 μm). The actuator has an in-plane angular deflection conversion which provides a force-displacement tradeoff and allows us to set step sizes varying from few nanometers to few micrometers with a minor change in design. In this paper, we designed 1-and 4-μm step-size devices. The actuator step size may change during the operation because of the slipping of the shuttle and the beam bending; however, our model successfully explains the reasons. One of our actuator prototypes has survived more than 25 million cycles without performance deterioration. The device is fabricated using the silicon-on-insulator-based multiuser MEMS process.[2007-0146]

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Large-strain, piezoelectric, in-plane micro-actuator

Cited by 36 publications

References 8 publications

A novel shape memory alloy microactuator for large in-plane strokes and forces

A novel shape memory alloy microactuator for large in-plane strokes and forces

Development of a novel flexure-based microgripper for high precision micro-object manipulation

A Low-Voltage Large-Displacement Large-Force Inchworm Actuator

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