Laser chemical vapor deposition of gold

Abstract

High quality gold spots and lines have been deposited from gaseous dimethyl (2, 4-pentanedionato) gold (III) using a focused argon ion laser. Growth rates of 1 μm/s at power densities of 4×105 W/cm2 were obtained. Resistivity, threshold writing power densities, and deposition rates were measured and their relationship to the physical and chemical properties of the gaseous complex are explored.

Vibrational interactions in dimethylgold(III) halides and carboxylates

“…The product yield was 60% (0.56 g). The melting point of complex dimethylgold(III) iodide was 94-95 C (lit., 95-96 C [29] 2 These compounds were synthesized from [Me 2 AuI] 2 in accordance with the conventional procedure described elsewhere [30], yield 80-90%. Dimethylgold(III) carboxylates were synthesized in a single step reaction from [Me 2 AuI] 2 and RCOOAg in toluene at the room temperature [24,31].…”

“…For instance, to the best of our knowledge, no assignments of the low-frequency vibrational bands of dimethylgold(III) complexes with organic ligands have been made so far. Dimethylgold 2 . The Au-X stretching modes were observed between 100 and 250 cm À1 in accordance with the DFT predictions.…”

“…Volatile gold complexes are important precursors of goldcontaining materials (e.g., nanoparticles and thin films) in the metal-organic chemical vapor deposition (MOCVD) processes [1][2][3][4]. These materials are used in optical devices [5][6][7], solar cells [8], nano and microelectronics [9][10][11][12], and in catalytic systems [13][14][15].…”

Thermolabile Noble Metal Precursors: (NO)[Au(NO3)4], (NO)2[Pd(NO3)4], and (NO)2[Pt(NO3)6]

“…[8][9][10][11][12] The drawback of CVD techniques is that organometallic compounds are usually used, leading to significant carbon contamination of the deposited metals. [13][14][15] Recently we have shown that the nitrylium nitrate (NO 2 )[Au(NO 3 ) 4 ] is a suitable thermolabile precursor for gold; this species was obtained from the reaction of elemental gold with N 2 O 5 . [16] The use of nitrogen oxides for the preparation of anhydrous nitrates can be traced back to the 1970s when Addison et al reported first investigations, mainly based on N 2 O 4 .…”

Synthesis, crystal structure and thermal behavior of dimethylgold(III) derivatives of salicylaldimine Schiff bases – Novel precursors for gold MOCVD applications

“…However, the study of gold MOCVD processes has been somewhat limited by the lack of suitable precursors [7]. The most popular precursors for the MOCVD of gold coatings are dimethylgold(III) b-diketonates [20][21][22]. On a base of our experience, these complexes are air, moisture and light sensitive, and suffer from poor stability during storage [23,24].…”