2018
DOI: 10.1364/oe.26.020965
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Laser direct-writing lithography equipment system for rapid and μm-precision fabrication on curved surfaces with large sag heights

Abstract: A novel laser direct writing lithography equipment system was proposed to realize rapid and μm-precision fabrication on curved surfaces with large curvatures and large sag heights. Through detailed design, analysis, simulation, and measurement, it showed that the system was able to continuously, linearly and rapidly change the focus position in z coordinate. For demonstration, a concentric-circular photoresist grating with a sag height of 5.2 mm and a designed line width/space of 12.5 μm/25 μm was fabricated w… Show more

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Cited by 16 publications
(10 citation statements)
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“…Laser printing could be used to pattern thermoplastic material doped with metal‐plastic additives on curved surfaces, while laser ablation could selectively ablate the substrate materials to form 3D patterns. [ 239 ] After laser printing or ablation processes, a plating process is generally adopted to build‐up the thickness of circuit lines as needed. Using laser to realize conformal printing greatly enhances the patterning efficiency, and it is able to produce circuits, functional lines and graphics directly through a pulsed nanosecond laser with stable power.…”
Section: Techniques For Direct Fabrication Of Curved Electronicsmentioning
confidence: 99%
“…Laser printing could be used to pattern thermoplastic material doped with metal‐plastic additives on curved surfaces, while laser ablation could selectively ablate the substrate materials to form 3D patterns. [ 239 ] After laser printing or ablation processes, a plating process is generally adopted to build‐up the thickness of circuit lines as needed. Using laser to realize conformal printing greatly enhances the patterning efficiency, and it is able to produce circuits, functional lines and graphics directly through a pulsed nanosecond laser with stable power.…”
Section: Techniques For Direct Fabrication Of Curved Electronicsmentioning
confidence: 99%
“…[ 7,8 ] The developed techniques in this framework allow the direct fabrication of functional devices on non‐flat substrates, such as curved [ 9 ] and stencil lithography, [ 10,11 ] electro‐hydrodynamic lithography, [ 12 ] 3D printing, [ 13 ] laser‐induced hydrothermal growth, [ 14 ] self‐assembly, [ 15 ] and laser direct writing. [ 16–18 ]…”
Section: Introductionmentioning
confidence: 99%
“…[7,8] The developed techniques in this framework allow the direct fabrication of functional devices on non-flat substrates, such as curved [9] and stencil lithography, [10,11] electro-hydrodynamic lithography, [12] 3D printing, [13] laser-induced hydrothermal growth, [14] selfassembly, [15] and laser direct writing. [16][17][18] In this setting, direct laser writing (DLW) enabled by twophoton polymerization (2PP) processes offers a great potential to realize arbitrary 3D micro-structures with submicrometric resolution and high precision. [19][20][21] Its integration with other methods and its possible exploitation on arbitrary complex systems can significantly improve applicability, thereby opening up unprecedented opportunities for the fabrication of highly conformable multifunctional devices for sensing, imaging, and communication.…”
Section: Introductionmentioning
confidence: 99%
“…Technologies for fabricating conformal electronics can be broadly categorized into: i) geometrical transformation of initially planar electronics for deformable electronics; and ii) direct printing of electronic materials onto complex surfaces for undeformable electronics. [ 18 ] However, methods for direct printing of undeformable electronics, including laser direct writing, [ 19 ] curved lithography, [ 20 ] and inkjet printing, [ 21 ] need expensive equipment and have limited substrates. Therefore, studies focused on the development of fabrication technologies for deformable electronics: techniques such as lithography, [ 22 ] deformable plastic stamping, [ 23 ] and hydroprinting [ 6,24–27 ] have gained considerable attention.…”
Section: Introductionmentioning
confidence: 99%