Laser-induced periodic surface structure. I. Theory

Sipe, J. E.; Young, Jeff F.; Preston, J. S.; Driel, H. M. van

doi:10.1103/physrevb.27.1141

Cited by 1,280 publications

(919 citation statements)

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confidence: 99%

“…The first observation of LIPSS dates back to 1965 14 . However, after almost 50 years and a large body of published work that has demonstrated LIPSS on various metals, semiconductors and glasses [15][16][17][18][19] , the method has not found widespread use due to the stubborn problem of quality control 18,19 .Despite the evident role of self-assembly in the LIPSS process, uniformity and long-range order remain poor, a problem we identified as originating from the fact that the structures are initiated from multiple seed locations concurrently and independently, thereby producing an irregular pattern. Because the process is irreversible, without self-correction, these irregularities become frozen.…”

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confidence: 99%

“…This constitutes another demonstration that unique technological capabilities can emerge naturally by exploitation of nonlinear photonic systems 7 . Although we optimized the process for the oxidation of titanium and tungsten under a regular atmosphere, many metals, semiconductors and dielectrics have been shown to support LIPSS formation [15][16][17][18][19] . In principle, any of these materials can be subjected to a variety of chemical reactions under a suitable atmosphere to fabricate nanostructures from a virtually inexhaustible list of material compositions.…”

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confidence: 99%

“…The main features of the model are summarized in the following and in the Methods, and the details are discussed in the Supplementary Information. Scattering of the incident laser field from a single point is modelled as dipole radiation 15,16 , with the relative height of the surface point setting the scattering amplitude. This is confirmed experimentally (Fig.…”

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Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses

Öktem¹,

Pavlov²,

İlday³

et al. 2013

Nature Photon

314

211

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Dynamical systems based on the interplay of nonlinear feedback mechanisms are ubiquitous in nature [1][2][3][4][5] . Well-understood examples from photonics include mode locking 6 and a broad class of fractal optics 7 , including self-similarity 8 . In addition to the fundamental interest in such systems, fascinating technical functionalities that are difficult or even impossible to achieve with linear systems can emerge naturally from them 7 if the right control tools can be applied. Here, we demonstrate a method that exploits positive nonlocal feedback to initiate, and negative local feedback to regulate, the growth of ultrafast laser-induced metal-oxide nanostructures with unprecedented uniformity, at high speed, low cost and on non-planar or flexible surfaces. The nonlocal nature of the feedback allows us to stitch the nanostructures seamlessly, enabling coverage of indefinitely large areas with subnanometre uniformity in periodicity. We demonstrate our approach through the fabrication of titanium dioxide and tungsten oxide nanostructures, but it can also be extended to a large variety of other materials.The fabrication of nanostructures on surfaces is of paramount importance in nanotechnology and materials science 9 . There are several established techniques, including photolithography, electron-beam lithography, imprint lithography 10 and laser interference lithography 11 , as well as non-conventional approaches such as selfassembly 12 and direct laser writing 13 . These techniques require either high-cost, complex systems or offer limited flexibility. An alternative flexible and potentially very low-cost method is laserinduced periodic surface structuring (LIPSS). The first observation of LIPSS dates back to 1965 14 . However, after almost 50 years and a large body of published work that has demonstrated LIPSS on various metals, semiconductors and glasses [15][16][17][18][19] , the method has not found widespread use due to the stubborn problem of quality control 18,19 .Despite the evident role of self-assembly in the LIPSS process, uniformity and long-range order remain poor, a problem we identified as originating from the fact that the structures are initiated from multiple seed locations concurrently and independently, thereby producing an irregular pattern. Because the process is irreversible, without self-correction, these irregularities become frozen. Our solution to this relies on carefully exploiting feedback mechanisms to tightly regulate the formation of nanostructures induced by ultrashort pulses. This process can be summarized in three steps.(1) The laser beam, with a peak intensity close to the ablation threshold for titanium, is focused on a titanium surface, where it is scattered by existing nanostructures or any surface defects 15 . The interference of the scattered and incident fields leads to intensity variations in the immediate neighbourhood of the scattering point. (2) At points where the threshold intensity for ablation is exceeded, titanium reacts rapidly with O 2 from the air, form...

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confidence: 99%

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confidence: 99%

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Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses

Öktem¹,

Pavlov²,

İlday³

et al. 2013

Nature Photon

314

211

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“…Further development of instabilities can lead to various self-organising phenomena. One of these phenomena, the spontaneous creation of a laser induced periodical surface structure (LIPSS), colloquially named "ripples" [30][31][32], is described below.…”

Section: Self-organised Laser Induced Periodic Surface Structures (Limentioning

confidence: 99%

Micromachining And Pattering In Micro/Nano Scale On Macroscopic Areas

Marczak

2015

Archives of Metallurgy and Materials

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This paper presents detailed discussion of selected examples of laser technologies for the modification of solid surfaces, including topographic and microstructural changes as well as both these alterations simultaneously. Laser surface micromachining has just entered the new generation of technologies that are used in surface engineering. It will be shown on the examples of applications in bioengineering, on the base of the author's own research, in modification of materials such as titanium and its alloys, diamond-like layers (DLC) deposited on silicon and polymer substrates.Keywords: lasers, surface modification, texturing, interference lithography, direct writing Artykuł przedstawia szczegółowe omówienie wybranych przykładów technologii laserowych związanych z modyfikacją powierzchni ciał stałych, obejmujących zmiany topograficzne i zmiany mikrostrukturalne, lub obie te zmiany jednocześnie. Laserowa mikroobróbka powierzchni weszła już do nowej generacji technologii, wykorzystywanych w inżynierii powierzchni. Zostanie to pokazane, na podstawie prac własnych, na przykładach zastosowań w bioinżynierii, w modyfikacji takich materiałów jak tytan i jego stopy oraz warstwy diamentopodobne (DLC) naniesione na podłoże krzemowe i polimerowe.

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Laser Fabrication and Nanostructuring

Esen¹,

Ostendorf²

2015

Photonics

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Laser-induced periodic surface structure. I. Theory

Cited by 1,280 publications

References 28 publications

Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses

Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses

Micromachining And Pattering In Micro/Nano Scale On Macroscopic Areas

Laser Fabrication and Nanostructuring

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