Laser polishing of diamond plates

Pimenov, S.M.; Кононенко, В. В.; Ralchenko, V. G.; Konov, V. I.; Gloor, S.; Lüthy, W.; Weber, H. P.; Хомич, А. В.

doi:10.1007/s003390050975

Cited by 60 publications

(31 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Evidently, this layer must be completely removed after laser treatment is completed, as even a very thin layer of the absorbing graphitic material decreases both the optical transmission and damage threshold of the optical element for CO2 laser radiation. In our previous papers [12,13] it was reported that this absorbing surface layer could be effectively removed either by hydrogen plasma etching or by oxidation in air at elevated temperatures. However, the thickness of graphite-like layer compared well with a required precision of diffractive relief height.…”

Section: ________mentioning

confidence: 98%

Laser shaping of diamond for IR diffractive optical elements

et al. 2002

View full text Add to dashboard Cite

Recently a new technique for laser-induced generation of phase relief to manufacture diamond diffractive lenses for the mid IR range has been proposed. In the present paper the realization of more complicated diamond diffractive optical elements (DOEs) is considered, able to transform a CO2 laser beam into arbitrary pre-given focal domains. Two DOEs for completely different tasks of laser beam focusing have been manufactured and finally investigated by means of various optical techniques. Measured intensity distributions in the DOEs focal planes as well as diffraction efficiencies have been compared with related results of computer simulation, and have been found to be in a good mutual concordance. The obtained results indicate that laser ablation technique can be effectively used to manufacture high quality diamond DOEs for laser beam focusing. Special attention is paid to the diamond surface graphitization in the process of laser ablation. Main parameters of excimer laser ablation are investigated and density of laser-induced graphite-like layer is defined. It was demonstrated experimentally that graphitized layer formed at different regimes of irradiation remains almost constant in thickness, but has different crystal structure.

show abstract

Section: ________mentioning

confidence: 98%

Laser shaping of diamond for IR diffractive optical elements

et al. 2002

View full text Add to dashboard Cite

show abstract

“…The most controlled situation is for sublimating (evaporating from solid phase) materials like diamond. Konov et al 3 demonstrated the excellent quality of laser polishing for thick diamond coatings (see Fig. 3, b, c).…”

Section: Laser Control Of Roughnessmentioning

confidence: 94%

“…At least here should be mentioned M.Gower et al 2 , V.I.Konov et al 3 , H.Weber et al 4 , V.P.Veiko et al 5 , C.M.Geiger et al 6 , I.Myamoto et al 7 , A.C.Tam et al 8 , J.Jiang et al 9 and others (look below).…”

Section: Introductionmentioning

confidence: 92%

General concept of a surface microgeometry reconstruction based on laser technology

Veiko¹

2002

Photon Processing in Microelectronics and Photonics

View full text Add to dashboard Cite

Surface of solids play a leading role in any process of interaction between solids, solids-liquids, solids-gases and solids-plasma. Microgeometry (roughness) is a key parameter of the solids surface which influence a lot mechanical, optical, electronic, chemical, thermical and other characteristics.Nowadays the laser-based technologies is a great challenge to improve a surface microgeometry (SM) quality and controllability.Different laser-based surface processing are considered: -surface microstructuring and control of roughness by laser ablation, -surface microstructuring based on creation of surface electromagnetic waves (SEW) and surface periodic structures (SPS), -surface smoothing and microstructuring based on laser heating till melting and further phenomena in a melted phase.Some examples of laser applications to improve optical, tribological and other surface characteristic are considered and analyzed.Future prospects of this field are discussed.

show abstract

“…It is possible to achieve the higher surface roughness than that by mechanical method. The surface roughness of Ra=0.12 μm can be achieved by ArF excimer laser polishing diamond films [17]. Therefore, it is reasonable to assign the positioning accuracy of 0.1 μm to the laser machine.…”

Section: Error Budget Analysismentioning

confidence: 99%