Laser-Shaped Thick-Film and LTCC Microresistors

Miś, Edward; Borucki, M.; Dziedzic, Andrzej; Kaminski, S.; Rebenklau, Lars; Wolter, Klaus‐Jürgen; Sonntag, Frank

doi:10.1109/estc.2006.280126

Cited by 7 publications

(2 citation statements)

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“…were applied as resistive films. KrF excimer laser (LPX 210 Lambda Physik model, wavelength k = 248 nm, 30 lm laserspot diameter on the surface, repetition rate À200 Hz, energy density on the surface À40 J/cm 2 , shaping by scanning with one pulse per lm) was used for shaping [14]. The test structures consisted of six resistors 170 lm wide and 200, 400, 600 or 800 lm long (see e.g.…”

Section: Fabrication and Geometrical Properties Of Laser-shaped Micromentioning

confidence: 99%

Fabrication and electrical properties of laser-shaped thick-film and LTCC microresistors

Nowak

Miś

Dziedzic

et al. 2009

Microelectronics Reliability

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Section: Fabrication and Geometrical Properties Of Laser-shaped Micromentioning

confidence: 99%

Fabrication and electrical properties of laser-shaped thick-film and LTCC microresistors

Nowak

Miś

Dziedzic

et al. 2009

Microelectronics Reliability

Self Cite

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“…In the case of fired conductive layers relatively low energy laser beam was used to avoid injury of the substrate. It is interesting to add that such laser shaping previously was used for fabrication of other thick-film and LTCC passives -microresistors [8] and microcapacitors [9]. 1 2…”

Section: Test Sample Fabricationmentioning

confidence: 99%

Chosen electrical and stability properties of laser-shaped thick-film and LTCC inductors

Bąk

Dudek

Dziedzic

et al. 2008

2008 2nd Electronics Systemintegration Technology Conference

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This paper presents fabrication as well as chosen electrical and stability properties of laser-shaped thickfilm (made on alumina) and LTCC (with DP 951 ceramic tape as a substrate) inductors. Such components are made based on silver or palladium-silver inks with 14-16 Jlm thickness. Inductance, resistance and quality factor, QL are determined in a wide frequency (10 kHz -110 MHz) and temperature (20°C -250°C) range and are analyzed as a function of inductor geometry (shape and width of conductive tracks) and metallurgy of conductive layer. The stability properties, Le. fractional inductance and resistance changes after long-term thermal ageing at elevated temperature (150°C and/or 250°C, 250 hours each) are also investigated and analyzed.

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