Laterally Actuated Platinum-Coated Polysilicon NEM Relays

Abstract

Laterally actuated polycrystalline silicon nanoelectromechanical (NEM) relays with enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room ambient conditions, the relays have a high contact resistance (> 1 GΩ) that requires high drain bias (3-5 V) to break through. The addition of a platinum sidewall coating reduces the on-resistance and the required drain bias to as low as 3 kΩ and 0.1 V, respectively. The platinum coating's stability is demonstrated by two tests: first, a contact-and-hold test where the relay passes current (~1μA) for up to 155 min and, second, a hot cycling test where the relay survives for over 108cycles . The NEMS relays are simulated using finite-element analysis, and the models are verified against experimental tests. Furthermore, the relays are configured and tested as a 2 : 1 multiplexer to show their potential as a digital logic component.

An Energy-Efficient Design Paradigm for a Memory Cell Based on Novel Nanoelectromechanical Switches

“…There are several implementations of NEM switches [26,27]. In this work, we consider 5-Terminal (5T) NEM switch which is illustrated in Figure 2(a) and (b).…”

Nanoelectromechanical Switches for Low-Power Digital Computing

“…Two proof-of-concept devices, simple cantilever or double-clamped beam structures, were reported with actuation voltage Vact > 12.5 V (Vpo > 3 V) and Vact > 26 V (Vpo > 19 V). The second article [53] goes further by detailing the properties and applications of NEM relays, the advantages of lateral actuation, device simulations, fabrication process development, reliability testing, and the demonstration of a relay multiplexer. The results show improved performance with Vact =10.7 V (Vpi =7.9 V), Rc ≈ 3 kΩ with Pt contact coating.…”

NEMsCAM: A novel CAM cell based on nano-electro-mechanical switch and CMOS for energy efficient TLBs

“…The SL wires run parallel to the BL wires, while the matchlines (ML) and wordlines (WL) are orthogonal to the BLs. By employing vertical NEM switches [26], the requirement of a long beam has little impact on the layout area, as it is out-of-plane. Two Gate1s are aligned and connected to their corresponding WL while the two Gate2s are connected to 0.…”

“…A NEM switch is a device in which a mechanically moving part makes or breaks a conductive path, typically in response to a voltage difference applied over its terminals. There are many different implementations of NEM switches [18], [22], [26]. Figure 1a illustrates the geometry of the 5T vertical NEM switch that we consider in this work [26].…”

“…There are many different implementations of NEM switches [18], [22], [26]. Figure 1a illustrates the geometry of the 5T vertical NEM switch that we consider in this work [26]. A suspended beam is anchored at the source.…”