1998
DOI: 10.1016/s0032-3861(97)00613-7
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Layer by layer imaging of diblock copolymer films with a scanning electron microscope

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Cited by 88 publications
(130 citation statements)
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“…[29][30][31][32] PI creates a wetting layer at the air interface, and etching has been used to reveal the sub-surface phase structure. More recently, solvent-annealing and the control of the solvent evaporation rate have been found to create ordered structures in a thin film of a similar diblock copolymer, polystyrene-b-polybutadiene (PS-b-PB).…”
Section: Preparation Of Copolymer Templatesmentioning
confidence: 99%
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“…[29][30][31][32] PI creates a wetting layer at the air interface, and etching has been used to reveal the sub-surface phase structure. More recently, solvent-annealing and the control of the solvent evaporation rate have been found to create ordered structures in a thin film of a similar diblock copolymer, polystyrene-b-polybutadiene (PS-b-PB).…”
Section: Preparation Of Copolymer Templatesmentioning
confidence: 99%
“…Drawing on the structures reported for PS-b-PLMA films, which was called a hybrid structure, 39 we propose that the PS surface shown here in The PI component has a strong interaction with the Si substrate and a lower surface free energy compared with the PS component. 29 Therefore, we expect that in thicker films the PI will wet the Si substrate and also create a wetting layer at the free surface to minimize the total interfacial free energy when in an equilibrium state.…”
Section: Preparation Of Copolymer Templatesmentioning
confidence: 99%
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“…The process involves shearing a film of sphere-forming BCP that is two layers thick, and produces alignment over the full extent of the sheared region; the top layer can subsequently be removed by reactive-ion etching with a non-selective gas such as CF 4 , as demonstrated in earlier work. [17] An attractive feature of the technique resides in its simplicity, requiring no specialized laboratory equipment. A two-layer-thick film of a polystyrene±block±poly(ethylene-alt-propylene) (PS±PEP) diblock copolymer was spincoated onto a polished Si substrate; an unpatterned elastomer pad was then placed between an aluminum block and the film.…”
mentioning
confidence: 99%
“…While methods employing progressive (layer-by-layer) etching in conjunction with either surface probe microscopy [3] or field-emission scanning electron microscopy [4] have been introduced for this intention, TEMT has provided the most detailed 3D analysis of nanostructured polymers and polymer nanocomposites to date. The present work will provide a timely overview of TEMT in the investigation of various "soft" materials possessing nanoscale morphological features.…”
mentioning
confidence: 99%