Lead–Zirconate–Titanate Acoustic Energy Harvesters with Dual Top Electrodes

Tomioka, Shungo; Kimura, Syo; Tsujimoto, Kyohei; Iizumi, Satoshi; Uchida, Yusuke; Tomii, Kazuki; Matsuda, Tomohiro; Nishioka, Yasushiro

doi:10.7567/jjap.50.09nd16

Cited by 12 publications

(14 citation statements)

References 23 publications

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“…The maximum output power occurs at the first mode while other modes demonstrate non-uniform cantilever bending. Possible charge distribution at first mode and (d) the conceptual schematic of peripheral and central energy harvesting [49]. Copyright (2011) The Japan Society of Applied Physics.…”

Section: Inorganic Piezoelectricmentioning

confidence: 99%

“…An acoustic piezoelectric energy harvester of diaphragm configuration with a cavity underneath is fabricated to scavenge power from sound input [49]. The thin film PZT MEMS acoustic energy harvester possesses dual top electrodes that manipulate different polarisation charges on the surface of the vibrating PZT diaphragm, at the first mode.…”

Section: Inorganic Piezoelectricmentioning

confidence: 99%

“…Figure 5. (a) Top view and (b) cross sectional view of the PZT diaphragm energy harvPossible charge distribution at first mode and (d) the conceptual schematic of peripheral an energy harvesting[49]. Copyright (2011) The Japan Society of Applied Physics.…”

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confidence: 99%

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Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review

et al. 2021

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The paper presents a comprehensive review of mechanical energy harvesters and microphone sensors for totally implanted hearing systems. The studies on hearing mechanisms, hearing losses and hearing solutions are first introduced to bring to light the necessity of creating and integrating the in vivo energy harvester and implantable microphone into a single chip. The in vivo energy harvester can continuously harness energy from the biomechanical motion of the internal organs. The implantable microphone executes mechanoelectrical transduction, and an array of such structures can filter sound frequency directly without an analogue-to-digital converter. The revision of the available transduction mechanisms, device configuration structures and piezoelectric material characteristics reveals the advantage of adopting the polymer-based piezoelectric transducers. A dual function of sensing the sound signal and simultaneously harvesting vibration energy to power up its system can be attained from a single transducer. Advanced process technology incorporates polymers into piezoelectric materials, initiating the invention of a self-powered and flexible transducer that is compatible with the human body, magnetic resonance imaging system (MRI) and the standard complementary metal-oxide-semiconductor (CMOS) processes. The polymer-based piezoelectric is a promising material that satisfies many of the requirements for obtaining high performance implantable microphones and in vivo piezoelectric energy harvesters.

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Section: Inorganic Piezoelectricmentioning

confidence: 99%

Section: Inorganic Piezoelectricmentioning

confidence: 99%

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Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review

et al. 2021

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“…Pb(Ti,Zr)O 3 (PZT) and its related materials have been applied as actuators 1,2) and energy harvesters 3) because of their excellent piezoelectric properties. However, owing to environmental issues, there is a strong demand for developing lead-free piezoelectric materials.…”

Section: Introductionmentioning

confidence: 99%

Effects of NiO addition on (K,Na,Li)NbO₃–BaZrO₃–(Bi,Na)TiO₃-based ceramics

Sakai

Futakuchi

Karaki

et al. 2014

Jpn. J. Appl. Phys.

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The effects of CuO or NiO addition on the sintering temperature and electrical properties of 0.92(K 0.47 Na 0.47 Li 0.06 )NbO 3 -0.07BaZrO 3 -0.01 (Bi 0.5 Na 0.5 )TiO 3 ceramics with a temperature-stable morphotropic phase boundary were investigated. The ceramics without any additives and those with NiO exhibited a tetragonal phase. The ceramics with CuO exhibited the coexisting orthorhombic and tetragonal phases. The sintering temperature was reduced by the addition of NiO or CuO. NiO addition was also effective for broadening the range of the sintering temperature window. The d 33 , radial-mode electromechanical coupling factor, and remanent polarization of the ceramics with NiO were 238 pC/N, 0.39, and 14 µC/cm 2 , respectively; moreover, the measured values of the ceramics with CuO were all lower than those of the ceramics with NiO. The results suggest that NiO acted as a sintering aid among grains, and the sintering temperature window was consequently broadened. In the case of CuO addition, Cu ions replaced the A-and B-sites of the ceramics, and such replacement reduced the tetragonality. As a result, the electrical properties of the ceramics with CuO were lower than those of the ceramics with NiO.

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“…Up to 9.8 nW/cm 2 of power density was reported at 100 dB-SPL using thin film lead-zirconate-titanate (PZT) MEMS acoustic energy harvesters [2]. A piezoelectric cantilever array reported by Jang et al uses thin film AlN piezoelectric transducers [3], but the generated voltage is on the order of 50 μV and requires an external power source for neural stimulation.…”

Section: Introductionmentioning

confidence: 99%

Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications

Koyuncuoğlu

İlik

Chamanian

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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This paper presents the first acoustic experimental results of a MEMS based bulk piezoelectric transducer for use in fully implantable cochlear implants (FICI). For this purpose, the transducer was attached onto an acoustically vibrating membrane. Sensing and energy harvesting performances were measured using neural stimulation and rectifier circuits, respectively. The chip has a 150 Hz bandwidth around 1800 Hz resonance frequency that is suitable for mechanical filtering as a sensor. As an energy harvester, bulk piezoelectric transducer generated a rectified power of 16.25 μW with 2.47 VDC with 120 dB-A sound input at 1780 Hz. Among other MEMS acoustic energy harvesters in the literature, reported transducer has the highest power density (1.5 × 10 −3 W/cm 3 ) to our knowledge.

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Lead–Zirconate–Titanate Acoustic Energy Harvesters with Dual Top Electrodes

Cited by 12 publications

References 23 publications

Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review

Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review

Effects of NiO addition on (K,Na,Li)NbO₃–BaZrO₃–(Bi,Na)TiO₃-based ceramics

Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications

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Lead–Zirconate–Titanate Acoustic Energy Harvesters with Dual Top Electrodes

Cited by 12 publications

References 23 publications

Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review

Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review

Effects of NiO addition on (K,Na,Li)NbO3–BaZrO3–(Bi,Na)TiO3-based ceramics

Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications

Contact Info

Product

Resources

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Effects of NiO addition on (K,Na,Li)NbO₃–BaZrO₃–(Bi,Na)TiO₃-based ceramics