Limitations of precision length measurements based on interferometers

Huang

et al. 2021

Sensors

This investigation develops a laser encoder system based on a heterodyne laser interferometer. For eliminating geometric errors, the optical structure of the proposed encoder system was carried out with the internal zero-point method. The designed structure can eliminate the geometric errors, including positioning error, straightness error, squareness error, and Abbe error of the positioning stage. The signal processing system is composed of commercial integrated circuits (ICs). The signal type of the proposed encoding system is a differential signal that is compatible with most motion control systems. The proposed encoder system is embedded in a two-dimensional positioning stage. By the experimental results of the positioning test in the measuring range of 27 mm × 27 mm, with a resolution of 15.8 nm, the maximum values of the positioning error and standard deviation are 12.64 nm and 126.4 nm, respectively, in the positioning experiments. The result shows that the proposed encoder system can fit the positioning requirements of the optoelectronic and semiconductor industries.

Section: Principle and Theorymentioning

confidence: 99%

Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage

Huang

et al. 2021

Sensors

“…However, a compensation of both the refractive index of the air (according to the information given by a Vaisela instrument: temperature, hygrometry and pressure) and the dead path has to be considered [19,20].…”

Section: In Situ Calibration Of the Capacitance Sensors And The Measumentioning

confidence: 99%

Concept and architecture of a new apparatus for cylindrical form measurement with a nanometric level of accuracy

Vissiere¹,

Nouira²,

Damak³

et al. 2012

Meas. Sci. Technol.

is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. AbstractIn relation to the industrial need and to the progress of technology, Laboratoire National de Métrologie et d'Essais (LNE) would like to improve the measurement of its primary pressure standards, spherical and flick standards. The spherical and flick standards are, respectively, used to calibrate the spindle motion error and the probe, which equip commercial conventional cylindricity-measuring machines. The primary pressure standards are obtained using pressure balances equipped with rotary pistons. To reach a relative uncertainty of 10 −6 in the pressure measurement, it is necessary to know the diameters of both the piston and the cylinder with an uncertainty of 5 nm for a piston diameter of 10 mm. Conventional machines are not able to reach such an uncertainty level. That is why the development of a new machine is necessary. The purpose of this paper is to present the concepts and the architecture adopted in the development of the new equipment dedicated to cylindricity measurement at a nanometric level of a accuracy. The choice of these concepts is based on the analysis of the uncertainty sources encountered in conventional architectures. The architecture of the new ultra-high equipment as well as the associated calibration procedures will be described and detailed.

“…Therefore, the development of a high-precision inspection system is a critical issue. It can be utilized to evaluate the performance of the precision equipment and to be a reference for the subsequent error compensation [1].…”

Section: Introductionmentioning

confidence: 99%

Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module

Wang

et al. 2022

Teh. glas. (Online)

This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Perot interferometer and photoelectronic inspection module to determine linear displacement, horizontal and vertical straightness geometric error parameters simultaneously. The interferometer and the photoelectronic inspection module in a three DOF measurement system share the same light source, and the two structures are used to measure linear displacement and straightness errors. The experimental results are utilized to calculate the relevant error parameters according to ISO standards and numerical analysis. They show that after the machine error compensation, the positioning deviation of the system is reduced from 55 μm to 19 μm, corresponding to the reduction of 65%. The accuracy is promoted from 65 μm to 31 μm, about the improvement of 52%. The horizontal and vertical straightness errors of the machine are 4.30 μm and 5.71 μm respectively.