Line-addressable torsional micromirrors for light modulator arrays

Dynamic stability of electrostatic torsional actuators with van der Waals effect

“…Xiao et al (2001Xiao et al ( , 2002Xiao et al ( , 2003 approach for rectangular and round double-gimbaled electrostatic torsional actuators, and compared the results of theoretical calculation with those of numerical simulation and experiment. The electrostatic torsional mirror was also investigated from experiment and theory by some literatures (see Jaecklin et al, 1994;Toshiyoshi and Fujita, 1996;Zhang et al, 2001). However, the vdW or Casimir effects were not considered for the torsional actuators in these literatures, so the theoretical results of critical tilting angle and pull-in voltage were higher than experimental results.…”

Fabrication of multilayer systems combining microfluidic and microoptical elements for fluorescence detection

“…The collected fluorescence light was collimated through an 800-m pinhole placed 2 mm away from the chip onto a photomultiplier tube. 15 According to the data sheet, the electronic bandwith of the photomultiplier output signal is 20 kHz. The signal was filtered 15 Hamamatsu H5701-5.…”

“…15 According to the data sheet, the electronic bandwith of the photomultiplier output signal is 20 kHz. The signal was filtered 15 Hamamatsu H5701-5.…”

“…These solutions require precise, and thus often expensive, bulky mechanical and optical systems, such as translation stages, movable mirrors, or confocal microscopes. Though microfabricated forms of some of these elements exist [15], [16], they do not allow the scanning of a large number of microfluidic channels (or microchannels) evenly distributed on a 100-mm wafer. Moreover, they are difficult to integrate, and hence not suitable for the realization of micro total analysis systems TAS .…”

Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation

“…He presented a silicon-based uniaxial micromirror with electrostatic parallel-plate actuation (Petersen 1980). Further publications on electrostatic actuated mirrors for light modulation followed (Gustafsson and Hok 1988;Hornbeck 1990;Jaecklin et al 1994). Quasistatic driven mirrors have many applications (Hao 2006;Milanovic et al 2004;Mirrorcle Technologies 2009;Sandner et al 2013;IPMS;Weinberger et al 2014).…”