Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation

Weinberger, Stefan; Nguyen, Thuong Thi; Lecomte, Roméo; Cheriguen, Yahia; Ament, Christoph; Hoffmann, Martin

doi:10.1007/s00542-015-2535-2

Cited by 8 publications

(5 citation statements)

References 20 publications

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“…Note that we further assumed that the effect of the 300 nm thick insulation layer can be neglected in comparison with the 10 µm gap between the electrodes. Equation (8) and its partial derivatives are numerically problematic when being evaluated at angles θ k close to zero. For simulation purposes, we therefore approximate the capacitance by a black-box model.…”

Section: Electrostatic Actuator Dynamicsmentioning

confidence: 99%

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Modeling and Control Design of a Contact-Based, Electrostatically Actuated Rotating Sphere

et al. 2022

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The performance of micromirrors in terms of their maximum deflection is often limited due to mechanical constraints in the design. To increase the range of achievable deflection angles, we present a novel concept in which a free-lying sphere with a flat side as reflector can be rotated. Due to the large forces needed to move the sphere, multiple electrostatic actuators are used to cooperatively rotate the sphere in iterative steps by impacts and friction. A parameterized system-level model of the configuration is derived, which considers arbitrary multi-contact scenarios and can be used for simulation, analysis, and control design purposes. Due to the complex, indirect relation between the actuator voltages and the sphere motion, model-based numerical optimization is applied to obtain suitable system inputs. This results in rotation sequences, which can be understood as a sequence of motion primitives, thus transforming the continuous time model into an abstract discrete time model. Based on this, we propose a feedback control strategy for trajectory following, considering model uncertainties by a learning scheme. High precision is achieved by an extension controlling the angular change of each rotation step. The suitability of the overall approach is demonstrated in simulation for maximum angles of 40°, achieving angular velocities of approximately 10°/s.

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Section: Electrostatic Actuator Dynamicsmentioning

confidence: 99%

“…Electrostatic micromirror devices are usually operated resonantly, as they only provide low forces and the angular deflection is limited by construction. Compared to electromagnetic concepts, small deflection angles can be achieved with digital mirror devices [8].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Control Design of a Contact-Based, Electrostatically Actuated Rotating Sphere

et al. 2022

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“…Some first experiments were carried out with reactively sputtered aluminium nitride as a piezo electric layer [40]. At the same time, the above-mentioned layers were used in actuator systems [41,42] and also in optical lens systems [43][44][45].…”

Section: Nanoimprint 221 State-of-the-art and Own Workmentioning

confidence: 99%

Towards alternative 3D nanofabrication in macroscopic working volumes

Kühnel

Fröhlich

Füßl

et al. 2018

Meas. Sci. Technol.

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This paper gives an overview of the research carried out at TU Ilmenau towards the development and application of tip- and laser-based nanofabrication on flat and curved surfaces in extended macroscopic working areas. It is shown that sub-10 nm structures can be fabricated by scanning probe lithography (SPL). The use of soft stamps has revealed their suitability for nanoimprinting on curved surfaces. Laser-based methods for a maskless exposure of resist on curved surfaces utilising 405 nm laser diodes have already been tested successfully. Furthermore, the current work deals with two-photon polymerisation, which has great potential with regard to the fabrication of sub-wavelength structures. At present, the methods mentioned have all been applied only in working ranges <100 × 100 μm2 in the plane and <10 μm in height. To overcome these limitations, the nanofabrication techniques are now being integrated in the nanopositioning and measuring machines (NPMMs) developed at TU Ilmenau. They offer working volumes of up to 200 × 200 × 25 mm3 with a positioning resolution of 20 pm. To provide access to any geometry elements in the 3D space with nanometre precision, the machine concepts as well as the metrological concepts are further developed. Due to the increased demands of lowest trajectory deviations within the fabrication process, new real-time controllers for probing and fabrication systems are investigated, as well as interactions in combined force and positioning sensors. Further important research is carried out into interference lithography, to enable an exposure of non-planar substrates and to improve the lateral structure resolution at the same time. A mix-and-match combination of such methods that allows the simultaneous exposure of large substrate regions with nanofabrication methods such as SPL becomes possible on the basis of the NPMMs, and is another area of great potential with regard to the research work presented in this paper.

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“…In recent years, to improve performances of MEMS devices, more and more researchers are focusing on the application of control scheme [9][10][11][12][13]. Compared with the improvement of fabrication technology, applying control scheme is low-cost and effective for solving specific problem, which is more recommendable.…”

Section: Introductionmentioning

confidence: 99%

Tracking of square reference signals using internal model‐based LQG robust controller for positioning of a micro‐electro‐mechanical systems micromirror

Tan

Sun

Yeow

2018

Micro & Nano Letters

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This work studies the Lorentz force-based polymer hard-magnetic micromirror for optical switch application. For this purpose, a robust control design is proposed, which is based on the linear quadratic gaussian method incorporating with the well-known internal model principle. The proposed scheme can simultaneously be easily implemented and it can improve the positioning performances and noise rejection ability. The effectiveness is verified by experimental results.

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Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation

Cited by 8 publications

References 20 publications

Modeling and Control Design of a Contact-Based, Electrostatically Actuated Rotating Sphere

Modeling and Control Design of a Contact-Based, Electrostatically Actuated Rotating Sphere

Towards alternative 3D nanofabrication in macroscopic working volumes

Tracking of square reference signals using internal model‐based LQG robust controller for positioning of a micro‐electro‐mechanical systems micromirror

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