2016
DOI: 10.7567/jjap.55.04ea04
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Liquid phase crystallized silicon on glass: Technology, material quality and back contacted heterojunction solar cells

Abstract: Liquid phase crystallization has emerged as a novel approach to grow large grained polycrystalline silicon films on glass with high electronic quality. In recent years a lot of effort was conducted by different groups to determine and optimize suitable interlayer materials, enhance the crystallographic quality or to improve post crystallization treatments. In this paper, we give an overview on liquid phase crystallization and describe the necessary process steps and discuss their influence on the absorber prop… Show more

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Cited by 44 publications
(48 citation statements)
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“…Many methods are being developed to prepare thin crystalline silicon absorber layers (<50 μm) in order to reduce material costs . Liquid phase crystallized silicon (LPC‐Si) on glass consists of a glass substrate, an interlayer stack and a 5–40 μm Si absorber, which is crystallized over a liquid phase by melting a silicon precursor layer with a line shaped energy source . The interlayer stack serves as diffusion barrier, anti‐reflection coating and passivation layer and is usually composed of silicon oxide (SiO x ), silicon nitride (SiN x ), and/or silicon oxynitride (SiO x N y ) layers .…”
Section: Introductionmentioning
confidence: 99%
“…Many methods are being developed to prepare thin crystalline silicon absorber layers (<50 μm) in order to reduce material costs . Liquid phase crystallized silicon (LPC‐Si) on glass consists of a glass substrate, an interlayer stack and a 5–40 μm Si absorber, which is crystallized over a liquid phase by melting a silicon precursor layer with a line shaped energy source . The interlayer stack serves as diffusion barrier, anti‐reflection coating and passivation layer and is usually composed of silicon oxide (SiO x ), silicon nitride (SiN x ), and/or silicon oxynitride (SiO x N y ) layers .…”
Section: Introductionmentioning
confidence: 99%
“…4,5 The LPC process is performed on a nanocrystalline Si layer on an interlayer stack on glass. Light management is used used to (i) reduce the reflective losses of the device via maximizing incoupling of light from the glass superstrate into the c-Si absorber, which has a high refractive index.…”
Section: Introductionmentioning
confidence: 99%
“…Polycrystalline silicon (poly‐Si) thin films have received considerable attention because of their great potential for advanced electronic and photovoltaic applications . In particular, they are now drawing attention as a promising alternative for solar cells that exhibit both high conversion efficiency and low production costs; consequently considerable research efforts have been devoted to the fabrication of high‐quality poly‐Si films with electrical properties that are suitable for low‐cost photovoltaic applications.…”
Section: Introductionmentioning
confidence: 99%