Long-range-ordering of self-assembled block copolymer nanodots using EB-drawn guide line and post mixing template

Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media

“…The fabrication process of BPM is similar to that described in the previous paper [7,8]. Figure 2 shows a schematic diagram of the fabrication process of BPM.…”

“…For this purpose, electron beam lithographic techniques are used to create physically or chemically a guide pattern on a media surface [4][5][6]. We have reported the fabrication of BPM by applying electron beam lithography and DSA [4,7,8]. Since it is difficult to form the servo pattern only by using the selfassembling property, we form a physical guide pattern by electron beam lithography and control the alignment of dot array.…”

Ordering of 6-nm-sized nanodot arrays with 10-nm-pitch using self-assembled block copolymers along electron beam-drawn guide-lines

“…Ordering with graphoepitaxy could be achieved by using three types of guide templates, namely guide line, post lattice, and mixing patterns [7]. This study used one of these templates to carry out the self-assembled ordering of nanodots.…”

“…To remove the PDMS top layer, CF 4 -RIEs of the samples were done for 10 s and 60 s using BCPs with MW of 30000-7500 and 7000-1500 g/mol, respectively. Subsequently, O 2 -RIEs were done for 180 s to remove the PS base and bottom layers between the PDMS dots [7]. The RIEs allowed the self-assembled PDMS dots ordering to appear.…”

“…The arrangement was done using self-assembled BCP with a pitch larger than 30 nm. Recently, our group demonstrated the long-range ordering of self-assembled poly dimethyl siloxane (PDMS) dot arrays with a pitch of 33 nm [7]. However, these experiments did not prove that the method could be used for patterned media with a density of more than 5 Tb/in 2 .…”