2018
DOI: 10.1016/j.apsusc.2018.07.208
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Long-term stability of photodetectors based on graphene field-effect transistors encapsulated with Si3N4 layers

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Cited by 23 publications
(10 citation statements)
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“…The buried-gate GFETs were fabricated using a similar method shown in our previous work [36]. The buried chromium (Cr)/gold (Au) gate electrodes with thicknesses of 10 and 30 nm were deposited on a substrate consisted of 200-nm-thick silicon nitride (Si 3 N 4 ), 50-nm-thick aluminum (Al), and 500-μm-thick silicon (Si), using magnetron sputtering.…”
Section: Methodsmentioning
confidence: 99%
“…The buried-gate GFETs were fabricated using a similar method shown in our previous work [36]. The buried chromium (Cr)/gold (Au) gate electrodes with thicknesses of 10 and 30 nm were deposited on a substrate consisted of 200-nm-thick silicon nitride (Si 3 N 4 ), 50-nm-thick aluminum (Al), and 500-μm-thick silicon (Si), using magnetron sputtering.…”
Section: Methodsmentioning
confidence: 99%
“…After depositing the Si 3 N 4protected layer, the intensity of the D peak rapidly increased; meanwhile, the intensity ratio of the 2D peak to the G peak (I 2D /I G ) decreased immensely from 3.08 to 0.60. Moreover, a slight shift in the G and 2D peaks was also observed [38,39]. The main explanation for the above phenomena is that the introduction of external atoms disrupts the lattice structure of graphene.…”
Section: Physical and Electrical Characteristics Of The N/mems Graphe...mentioning
confidence: 83%
“…Compared with the intensity ratio between the D and G peaks ( I D / I G ratio) in the pure graphene of 0.20, the I D / I G ratio of DTAP–graphene increased to 0.77, indicating the conversion of sp 2 to sp 3 basal carbon atoms, which could be attributed to the formation of the covalent bonding between DTAP and graphene. The I 2D / I G ratio of DTAP–graphene also decreased, which could be caused by the disruption of the lattice structure by introducing extra atoms . Besides, both the 2D and G peaks red-shifted after introducing the DTAP, indicating that covalent coupling of DTAP with graphene could evoke n-type doping of graphene …”
Section: Results and Discussionmentioning
confidence: 99%