2008
DOI: 10.1016/j.jcrysgro.2007.11.091
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Low-cost high-quality GaN by one-step growth

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Cited by 5 publications
(3 citation statements)
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“…This dependence is related to the near-equilibrium conditions in the HVPE process. Growth is governed by surface kinetics: adsorption and decomposition of the growth precursors, desorption and diffusion of the ad-species, as demonstrated by the strong temperature dependence of GaN HVPE growth rate under optimized conditions. , The growth rate of GaN NRs is almost low regarding the capabilities of HVPE for the growth of GaN bulk layers (up to 100 μm/h) . With respect to the state-of-the art, the hexagonal GaN NRs has been obtained.…”
Section: Discussion: Gan Nr Growth Mechanismmentioning
confidence: 99%
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“…This dependence is related to the near-equilibrium conditions in the HVPE process. Growth is governed by surface kinetics: adsorption and decomposition of the growth precursors, desorption and diffusion of the ad-species, as demonstrated by the strong temperature dependence of GaN HVPE growth rate under optimized conditions. , The growth rate of GaN NRs is almost low regarding the capabilities of HVPE for the growth of GaN bulk layers (up to 100 μm/h) . With respect to the state-of-the art, the hexagonal GaN NRs has been obtained.…”
Section: Discussion: Gan Nr Growth Mechanismmentioning
confidence: 99%
“…GaN NRs were grown in a 2 in. horizontal home-designed HVPE reactor at atmospheric pressure, heated by a six-zone furnace. , In a first upward zone, GaCl vapor species were formed by reacting gaseous HCl with liquid gallium at 800 °C. NH 3 species, used as the group V flow, were directly introduced into a central zone.…”
Section: Methodsmentioning
confidence: 99%
“…Wang et al, 2006;Kang et al, 2007), the different patterns (shapes or sizes) of the patterned sapphire substrate were found to be able to influence the growth behavior and dislocation distribution of the GaN epilayers. The epitaxial lateral overgrowth growth by hydride vapor phase epitaxy of GaN on patterned metalorganic vapor-phase epitaxy GaN/sapphire and sapphire substrates was investigated by Tourret (Tourret et al, 2008). High-quality uniform GaN films about 10 mm thick were successfully grown after epitaxial lateral overgrowth and coalescence on sapphire substrates.…”
Section: Epitaxial Lateral Overgrowthmentioning
confidence: 99%