1997
DOI: 10.1116/1.580948
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Low-energy broad beam electron gun

Abstract: Compact UHV system for fabrication and in situ analysis of electron beam deposited structures using a focused low energy electron beam Rev. Sci. Instrum. 77, 053702 (2006); High power, high uniformity strip electron gun design, simulation and performance Rev.A microwave plasma cathode electron gun for ion beam neutralization Rev.A low-energy electron gun for the energy range of 5-100 eV providing a uniform and high electron flux over a circular surface area of several cm 2 has been designed and tested. Focusin… Show more

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Cited by 8 publications
(1 citation statement)
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“…There is an emerging need for fine-variable electron guns in a number of applications including radar guns, cathode ray tubes, and many experimental designs [1][2][3][4][5][6]. For these purposes, electron guns have been successfully designed and operated with different methods [2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…There is an emerging need for fine-variable electron guns in a number of applications including radar guns, cathode ray tubes, and many experimental designs [1][2][3][4][5][6]. For these purposes, electron guns have been successfully designed and operated with different methods [2][3][4].…”
Section: Introductionmentioning
confidence: 99%