Low Noise Combined Optical-Chemical CMOS Sensor For Biomedical Application

Nematzadeh, Mozhdeh; Häfliger, Philipp; Rikan, Behnam Samadpoor; Nøvik, Steffen; Ostby, J.M.

doi:10.1109/mwscas.2019.8885280

Cited by 1 publication

(1 citation statement)

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“…Instead of patterning a ring with SU-8 to stop the flow of epoxy, we have focused on developing a robust method that also covers the bonding wires and pads with SU-8. We have briefly described this process previously [34] and in the present paper we expand upon the method. SU-8 is commonly spun onto a substrate (typically wafers) to achieve precise control of the layer thickness.…”

Section: Packaging In Su-8mentioning

confidence: 99%

A CMOS Multi-Electrode Array for Four-Electrode Bioimpedance Measurements

Nøvik

Drageseth

Grondalen

et al. 2022

IEEE Trans. Biomed. Circuits Syst.

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This work demonstrates how a multielectrode array (MEA) dedicated to four-electrode bioimpedance measurements can be implemented on a complementary metal-oxide-semiconductor (CMOS) chip. As a proof of concept, an 8x8 pixel array along with dedicated amplifiers was designed and fabricated in the TSMC 180 nm process. Each pixel in the array contains a circular current carrying (CC) electrode that can act as a current source or sink. In order to measure a differential voltage between the pixels, each CC electrode is surrounded by a ring shaped pick up (PU) electrode. The differential voltages can be measured by an onboard instrumentation amplifier, while the currents can be measured with an on-bard transimpedance amplifier. Openings in the passivation layer exposed the aluminum top metal layer, and a metal stack of zinc, nickel and gold was deposited in an electroless plating process. The chips were then wire bonded to a ceramic package and prepared for wet experiments by encapsulating the bonding wires and pads in the photoresist SU-8. Measurements in liquids with different conductivities were performed to demonstrate the functionality of the chip.

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Section: Packaging In Su-8mentioning

confidence: 99%