Low-temperature crystallization of doped a-Si:H alloys

Abstract

Crystallization of phosphorus-doped a-Si:H has been initiated at a substrate temperature below 200 °C, under the deposition conditions of a low flow rate of silane and in the presence of an external magnetic field. Along with the crystallization, the doping efficiency of the resulting Si:H films has been remarkably improved. Room-temperature conductivity as high as 27 Ω−1 cm−1 has been achieved at a doping ratio of NPH3/NSiH4=5.6×10−3 for a specimen deposited at 30 C. Optical emission spectroscopy during the plasma deposition has revealed that a weak emission intensity of the SiH band with respect to hydrogen lines and the absence of emission from the doubly excited states of hydrogen molecules are necessary conditions for the crystallization of doped Si:H films.

Post hydrogenation effect by hot wire method on poly-crystalline silicon based devices

“…Several techniques for low-temperature deposition of poly-Si have been intensively investigated like, e.g. magnetron sputtering [1], plasma enhanced chemical vapor deposition (PECVD) [2], hot-wire CVD (HW-CVD) [3], and photo-CVD [4]. These techniques, however, are not fully mature yet and several problems need to be solved.…”

Improving the Passivation Stability of a Polymer Thin Film on Si by the Introduction of MoO3 Nanoparticles Into the Polymer Matrix

“…Compared with the good conductivity of PEDOT, PSS is usually regarded as an insulator . Here, our measurements show that the PSS thin film possessed an initial value of 34 mS cm −1 , which rivals the conductivity of doped a‐Si:H thin films . It was found that the conductivity of PSS was not stable under exposure to the ambient environment and degraded from 34 to 4.5 mS cm −1 in 1 h. The mechanism of the conductivity stability is related to the hydrophilicity of the PSS thin films, and more detailed analysis is seen in the supplementary material.…”

Amorphous and Microcrystalline Silicon Solar Cells

“…Microcrystalline silicon was first reported by Veprek and Marecek in Europe in 1968 [71], and in Japan by Matsuda et al [72] and Hamasaki et al [73] in 1980.…”