2010
DOI: 10.1117/12.848404
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LPP source system development for HVM

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Cited by 12 publications
(11 citation statements)
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“…They reported that with the HVM1, the IF equivalent EUV power of 11 W was observed when the laser was operated at 50% duty cycle. 5 The diameter of tin droplets generated at 40 kHz was 30 μm, 5 and the ejection speed of droplets was 30 m∕s.…”
Section: Sn Lpp At Cymer and Gigaphotonmentioning
confidence: 99%
See 3 more Smart Citations
“…They reported that with the HVM1, the IF equivalent EUV power of 11 W was observed when the laser was operated at 50% duty cycle. 5 The diameter of tin droplets generated at 40 kHz was 30 μm, 5 and the ejection speed of droplets was 30 m∕s.…”
Section: Sn Lpp At Cymer and Gigaphotonmentioning
confidence: 99%
“…5 Then the EUV power at the source is calculated to be 17.5 kW × 3% ¼ 525 W∕2πsr. Because the repetition rate was 40 kHz, the EUV energy in one pulse is 26 mJ∕4πsr.…”
Section: Opacitymentioning
confidence: 99%
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“…This paper focuses on some aspects of EUV source technology applicable to EUVL, in particular laser−pro− duced−plasma (LPP) source emitting at a 13.5−nm wave− length using Sn as a fuel and driven by a pulsed CO 2 laser. Such choice of fuel and driver was shown to be the most practical option for a number of reasons; highest possible conversion efficiency (CE) in a range of 3-6% (at 2−% bandwidth at 13.5 nm) among the low−environmental−haz− ard candidate materials [20,21]; technical feasibility of EUV collection optics with substantial reflectivities around the 13.5 nm [22]; sufficiently small size of the EUV emitting plasma thanks to the focusability of a driv− ing laser beam; low debris production when combined with a 10.6−micron wavelength provided by a CO 2 laser driver [23][24]; and finally the viability of required multi− −kW laser power output of mentioned CO 2 lasers [25][26] allowing for a power scalability. The LPP source principle is also a promising route to a shorter wavelength range of 6.Xnm using Gd as a fuel and is presently an area of active research efforts [27,28].…”
Section: Introductionmentioning
confidence: 99%