&lt;title&gt;Active-matrix-addressed micromirror array for wavefront correction in adaptive optics&lt;/title&gt;

Gehner, Andreas; Doleschal, Wolfgang; Elgner, Andreas; Kauert, Reinhard; Kunze, Detlef; Wildenhain, Michael

doi:10.1117/12.443095

Cited by 12 publications

(5 citation statements)

References 3 publications

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“…Lucent will develop mirrors meeting the vision science goals using the electret membrane technology. Other MEMS DM efforts are being monitored for possible vision science application, including Stanford University spin-off Intellite, Stanford, the Fraunhofer Institute [11], Boston University metal mirror with integrated electronics [12], the University of Colorado [13], and JPL [8,9,10]. In year five, the CfAO will strive to refine the MEMS DMs to meet vision science goals, particularly increasing actuator range and integrating electronics for reduced unit cost and form factor.…”

Section: Cfao Mems Plan For Year Four (2002/2003) and Beyondmentioning

confidence: 99%

MOEMS spatial light modulator development at the Center for Adaptive Optics

et al. 2003

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The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor & Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.

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Section: Cfao Mems Plan For Year Four (2002/2003) and Beyondmentioning

confidence: 99%

MOEMS spatial light modulator development at the Center for Adaptive Optics

et al. 2003

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“…The Fraunhofer IPMS on the other hand, has been developing large-scale integrated analog micro mirror arrays for several years with up to 1 MPixels for an application in sub-µ lithography [20], now exploiting this technology also for the realization of a 240 x 200 piston-type Micro Mirror Array (MMA) for Adaptive Optics. The MMA technology already was presented in detail [21][22][23], whereas this paper moreover will emphazise on the overall data communication and system integration, which now has been made user accessible by means of the supplied Phase Former Kit. Furthermore, the paper will give a compilation of the results from major applications of the device.…”

Section: Introductionmentioning

confidence: 99%

MEMS phase former kit for high-resolution wavefront control

et al. 2005

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The MEMS Phase Former Kit developed by the Fraunhofer IPMS is a complete Spatial Light Modulator system based on a piston-type Micro Mirror Array (MMA) for the use in high-resolution, high-speed optical phase control. It has been designed for an easy system integration into an user-specific environment to offer a platform for first practical investigations to open up new applications in Adaptive Optics. The key component is a fine segmented 240 x 200 array of 40 µm piston-type mirror elements capable of 400 nm analog deflection for a 2pi phase modulation in the visible. Each mirror can be addressed and deflected independently by means of an integrated CMOS backplane address circuitry at an 8bit height resolution. Full user programmability and control is provided by a newly developed comfortable driver software for Windows XP based PCs supporting both a Graphical User Interface (GUI) for stand-alone operation with pre-defined data patterns as well as an open ActiveX programming interface for a closed-loop operation with real-time data from an external source. An IEEE1394a FireWire interface is used for high-speed data communication with an electronic driving board performing the actual MMA programming and control allowing for an overall frame rate of up to 500 Hz. Successful proof-of-concept demonstrations already have been given for eye aberration correction in ophthalmology, for error compensation of leightweight primary mirrors of future space telescopes and for ultra-short laser pulse shaping. Besides a presentation of the basic device concept and system architecture the paper will give an overview of the obtained results from these applications

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“…Therewith, devices with an unprecedented high spatial resolution and precision may be realized providing an excellent reproduction capability especially for complex higher order aberrations. For that reason, the Fraunhofer IPMS has developed a high-resolution fine segmented MEMS micro mirror array together with an underlying integrated active-matrix CMOS address circuitry [4,5]. The device provides 240 x 200 piston-type mirror elements with 40 µm pixel size.…”

Section: Introductionmentioning

confidence: 99%

AO SLM demonstration system and test bed

et al. 2007

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In order to demonstrate and to quantitatively evaluate the wavefront correction capabilities of a spatial light modulator (SLM) for optical imaging enhancement in Adaptive Optics (AO) a compact and flexible demonstration system and test bed has been developed. It basically consists of a projection system, where image objects of different complexity and spatial resolution can be implemented and imaged through Adaptive Optics onto a CCD camera. Furthermore, static and dynamic wavefront errors of different severeness can be introduced by means of fixed and rotating phase plates. With this system for the first time the optical performance of the Fraunhofer IPMS 240 x 200 micro mirror SLM for highresolution wavefront control has been characterized. For an incoherent or partially coherent imaging as employed in this case the image quality normally is assessed in terms of the Modulation Transfer Function (MTF). Therefore, a quantitative evaluation has been carried out by measuring the system MTF including the SLM for a number of spatial frequencies as well as for a variety of different complex aberrations without and with applied correction. Besides a description of the system set-up the obtained results on the imaging improvement and MTF measurement are presented

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<title>Active-matrix-addressed micromirror array for wavefront correction in adaptive optics</title>

Cited by 12 publications

References 3 publications

MOEMS spatial light modulator development at the Center for Adaptive Optics

MOEMS spatial light modulator development at the Center for Adaptive Optics

MEMS phase former kit for high-resolution wavefront control

AO SLM demonstration system and test bed

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