&lt;title&gt;High damage threshold mirrors and polarizers in the ZrO2/SiO2 and HfO2/SiO2 dielectric systems&lt;/title&gt;

Fournet, Carine; Pinot, B.; Geenen, Bernard; Ollivier, F.-X.; Alexandre, W.; Floch, Hervé G.; Roussel, André; Cordillot, C.; Billon, Danielle

doi:10.1117/12.60095

Cited by 14 publications

(4 citation statements)

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“…These materials were chosen because of their wide band gap and previous demonstration of high laser damage threshold for evaporated coatings. 5,6 High reflectors of ZrO 2 /SiO 2 consisted of nineteen quarter wave layers centered at 1.064µm and had 99.9% reflectance. High reflectors of HfO 2 /SiO 2 consisted of twenty-one layer quarter wave layers centered at 1.064µm and had 99.8% reflectance.…”

Section: Coating Designs and Film Materialsmentioning

confidence: 99%

Damage thresholds of HfO 2 /SiO 2 and ZrO 2 /SiO 2 high reflectors at 1.064 microns deposited by reactive DC magnetron sputtering

et al. 2005

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HfO 2 /SiO 2 and ZrO 2 /SiO 2 high reflectors at 1.064 µm were deposited by pulsed reactive DC magnetron sputtering. These dielectric thin film high reflectors were deposited with and without the use of an electron source. The electron source greatly decreased arcing of the magnetrons during the deposition process resulting in thin films with fewer defects. The high reflectors were laser damage tested at 1.064 µm. The optical properties of the thin film coatings were characterized prior to laser damage testing. Optical characterization techniques included angle resolved scatter (BRDF), total integrated scatter (TIS), and adiabatic calorimetry. The dependence of the laser damage threshold and optical properties on deposition conditions is reported.

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Section: Coating Designs and Film Materialsmentioning

confidence: 99%

Damage thresholds of HfO 2 /SiO 2 and ZrO 2 /SiO 2 high reflectors at 1.064 microns deposited by reactive DC magnetron sputtering

et al. 2005

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“…Nowadays, oxide thin multilayers (based on ZrO 2 /SiO 2 and HfO 2 /SiO 2 pairs) are used as protective coatings, which are resistant to laser irradiation [1][2][3]. Such bilayers are prospective due to a high melting point and a low intrinsic absorption [1]. The operating wavelengths of such coatings lie in the range of middle UV, visible and near IR radiation [4,5].…”

Section: Introductionmentioning

confidence: 99%

Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation

et al. 2022

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This study discusses the main features of the irradiation of prospective multilayer coatings by VUV/UV radiation from compressed plasma flows. Such radiation is characterized by a broadband spectrum and high brightness fluxes. Oxide and Mo/Si bilayers were used as the basis of the reflective multilayers for the visible and UV ranges. A gas-dynamic response from the irradiated surfaces was studied with schlieren photography. The properties of original and irradiated multilayers were described with ultra violet visible infrared spectroscopy (UV-Vis-IR), X-ray diffraction (XRD), X-ray reflectometry, scanning electron microscopy (SEM) and other techniques. Data on the degradation of optical properties and surface morphology were obtained.

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“…In latest decade years, researchers have done a lot of work to study the damage susceptibility of optics applied in high power laser system. Most of their works focused on the laser damage of the high reflective coatings and polarizer [1][2] . Their works indicate that the damage of the film is mainly induced by nodular defects, and the typical damage morphologies are shown as scald and ablation and delamination.…”

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confidence: 99%

Laser-induced damage of transmissive optics at 1064 nm

Hu¹,

Zhang²,

Ma³

et al. 2006

SPIE Proceedings

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In this paper, the laser damage of transmissive optics used in high power Nd:YAG laser was studied in details by use of Nd:YAG damage testing system, the damage experiment was taken by 1-on-1 damage measurement method, and the damage morphology was observed by 200X Normaski microscope. The wavelength of laser is 1064nm and the duration of pulse is 10ns. Experiment result shows that the damage morphology of transmissive optics such as AR coatings and polarizer has same damage shape-pinhole, which is notable different from that of HR coatings. The pinhole is about round with diameter 10-50um, separated on the damage area of coatings and deep to the surface and sub-surface of the substrate. Specially, the damage pinhole exhibits on the rear surface of AR coatings and on the front surface of the polarizer respectively. On certain range of the laser energy density, the density improvement don't increase the size of the pinhole, just only increases the amounts of the pinhole. We think the pinhole is mainly induced by standing wave electrical field formed by laser and the defects near the both surface of the substrate.Key word: laser damage, transmissive optical coatings. 1． INTRDUCTIONThe transmissive optics such as AR coatings, polarization coatings, K9 glass, fused silicon, and KDP etc, are important elements for high power Nd:YAG laser system, whose Laser damage threshold directly affects the performance of laser system and the output of laser. In latest decade years, researchers have done a lot of work to study the damage susceptibility of optics applied in high power laser system. Most of their works focused on the laser damage of the high reflective coatings and polarizer [1][2] . Their works indicate that the damage of the film is mainly induced by nodular defects, and the typical damage morphologies are shown as scald and ablation and delamination. However, little work has been done with the laser transmissive optics. In order to get the damage information of the transmissive optics, damage experiments at 1064 nm were done on the typical transmissive optics such as fine-polished K9 substrate, AR coatings and polarizer. In these experiments, the marked characteristics are that all samples have formed the pinhole damage, which would modulate the laser beam and make the Talbot-self-image and hot-spot effect in high power laser system. 2． DAMAGE EXPERIMENT Test samplesThe testing samples were K9 substrate, AR coatings and polarizer at 1064 nm. The K9 substrate was fine-polished by CeO 2 , and the roughness was less than 1 nm (RMS). The AR coatings were deposited on both sides of K9 substrate, and the transmission was about 99.8%. For polarizer, its transmission for P light was more than 97%, and the extinction ratio was much than 500:1. The size of all the samples was Φ40 mm × 3 mm. Experiment setup and methodsAs shown in Fig.1, the experimental system was consisted with the following elements. A Q-switched Nd:YAG laser, which can output 1.5 J laser energy, was used as the damage laser , the laser mode is TEM 00 an...

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<title>High damage threshold mirrors and polarizers in the ZrO2/SiO2 and HfO2/SiO2 dielectric systems</title>

Cited by 14 publications

References 0 publications

Damage thresholds of HfO 2 /SiO 2 and ZrO 2 /SiO 2 high reflectors at 1.064 microns deposited by reactive DC magnetron sputtering

Damage thresholds of HfO 2 /SiO 2 and ZrO 2 /SiO 2 high reflectors at 1.064 microns deposited by reactive DC magnetron sputtering

Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation

Laser-induced damage of transmissive optics at 1064 nm

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