<title>Influence of process variation on the functionality of a high-pressure sensor</title>

Abstract

A sensor designer has to keep in mind a couple of things developing a new product. These are performance, reliability and last but not least cost. Cost is mainly a function of yield. To be successful on the market, it is therefore necessary to predict yield for a new design, based on its process steps. This can be done only by modelling a sensor based on process parameters as input to the models. How to realize this, will be shown for the design of a high pressure sensor.

A small size high pressure sensor based on metal thin film technology

“…The mechanical stability of the steel membrane is considered by simulating the maximum stress with FEM (finite element method) to ensure a high burst pressure [5]. A hermetic sealed connection is guaranteed by welding the steel substrate on a pressure connection fitting.…”