&lt;title&gt;Integration of deformable mirror devices with optical fibers and waveguides&lt;/title&gt;

Boysel, R. Mark; McDonald, Terrance; Magel, Gregory A.; Smith, G. C.; Leonard, Jerry L.

doi:10.1117/12.141225

Cited by 28 publications

(20 citation statements)

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“…4 shows the losses of the guided slab mode after decreasing the gap width from infinity (no attenuation) to 100 nm, versus the thickness of the core layer, , as calculated with a commercially available two-dimensional (2-D) modesolver. 1 The smallest gap width being 100 nm, results from the incorporation of bumps into the design as discussed later on. From the figure, it is clear that for all values of the effects are extremely large.…”

Section: A Optical Designmentioning

confidence: 99%

“…In this region the evanescent field has a larger penetration depth than in the air gap and a cladding thickness ( initial gap width), m has to be chosen to assure that the attenuation by the silicon is less than 0.01 dB/cm in this region. 1 For the choice of the thickness of the buffer layer the same type of consideration holds as for the initial gap width. Now the penetration depth of the field into the buffer is largest in the air-gap region and a thickness m is used to assure that the attenuation due to the silicon substrate dB/cm in this region.…”

Section: A Optical Designmentioning

confidence: 99%

“…Devices based on the integrated optic nanomechanical (IONM) effect do not show these drawbacks. In these devices, the mechanooptical interaction is achieved by moving an element into the evanescent field of a waveguide mode [1], [2]. Fig.…”

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confidence: 99%

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Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage

Veldhuis

Nauta

Chen

et al. 1999

IEEE J. Select. Topics Quantum Electron.

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Abstract-This paper reports on an integrated mechanooptical waveguide ON-OFF switch, where an absorbing element is moved into and out of the evanescent field of the guided mode in order to achieve switching. For the electrostatically driven devices, an extinction ratio of 65 dB at an actuation voltage of 2.5 V has been achieved in a 9.5-mm-long device for a wavelength of 632.8 nm. The calculated mechanical fundamental resonance frequency is 1.95 kHz. The device design enables future vacuum sealing that will annihilate the squeeze damping which, in the present device, reduces the response time to 10 s. Full-wafer scale fabrication is enabled by using standard silicon technology, chemical mechanical polishing and aligned wafer bonding. The devices can be used for channel selection purposes in integrated optical sensor arrays.Index Terms-Chemical mechanical polishing, integrated optic nanomechanical effect, integrated optics, microelectromechanical devices, micromechanooptical devices, optical modulators, wafer bonding, waveguide attenuators.

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Section: A Optical Designmentioning

confidence: 99%

Section: A Optical Designmentioning

confidence: 99%

See 1 more Smart Citation

Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage

Veldhuis

Nauta

Chen

et al. 1999

IEEE J. Select. Topics Quantum Electron.

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“…They have also found potential applications in RF/microwave, optical communication, energy scavenging, and bio-medical areas. Texas Instruments' Digital Micromirror Device (DMD) for digital projectors [1], Analog Device's accelerometer for airbag deployment [2], STMicroelectronics' gyroscopes in iPhones, and MEMS printer heads for inkjet printers are only a few examples of commercial uses of MEMS technology.…”

Section: Icroelectromechanical Systems (Mems)mentioning

confidence: 99%

MEMS Reliability Review

Huang

Vasan

Doraiswami

et al. 2012

IEEE Trans. Device Mater. Relib.

163

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Abstract-Microelectromechanical systems (MEMS) represents a technology that integrates miniaturized mechanical and electromechanical components (i.e., sensors and actuators) that are made using microfabrication techniques. MEMS devices have become an essential component in a wide range of applications, ranging from medical and military to consumer electronics. As MEMS technology is implemented in a growing range of areas, the reliability of MEMS devices is a concern. Understanding the failure mechanisms is a prerequisite for quantifying and improving the reliability of MEMS devices. This paper reviews the common failure mechanisms in MEMS, including mechanical fracture, fatigue, creep, stiction, wear, electrical short and open, contamination, their effects on devices' performance, inspection techniques, and approaches to mitigate those failures through structure optimization and material selection.

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“…More micro mirrors have been fabricated for use as display [6] optical switches [7,8] and scanners [9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Rotational MEMS mirror with latching arm for silicon photonics

et al. 2015

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We present an innovative rotational MEMS mirror that can control the direction of propagation of light beams inside of planar waveguides implemented in silicon photonics. Potential applications include but are not limited to optical telecommunications, medical imaging, scan and spectrometry. The mirror has a half-cylinder shape with a radius of 300 µm that provides low and constant optical losses over the full angular displacement range. A circular comb drive structure is anchored such that it allows free or latched rotation experimentally demonstrated over 8.5° (X-Y planar rotational movement) using 290V electrostatic actuation. The entire MEMS structure was implemented using the MEMSCAP SOIMUMPs process. The center of the anchor beam is designed to be the approximate rotation point of the circular comb drive to counter the rotation offset of the mirror displacement. A mechanical characterization of the MEMS mirror is presented. The latching mechanism provides up to 20 different angular locking positions allowing the mirror to counter any resonance or vibration effects and it is actuated with an electrostatic linear comb drive. An innovative gap closing structure was designed to reduce optical propagation losses due to beam divergence in the interstitial space between the mirror and the planar waveguide. The gap closing structure is also electrostatically actuated and includes two side stoppers to prevent stiction.

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<title>Integration of deformable mirror devices with optical fibers and waveguides</title>

Cited by 28 publications

References 0 publications

Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage

Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage

MEMS Reliability Review

Rotational MEMS mirror with latching arm for silicon photonics

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