&lt;title&gt;Main characteristics of a miniaturized multipurpose infrared spectrometer&lt;/title&gt;

Keraenen, Kimmo; Blomberg, Martti; Rusanen, Outi; Karioja, Pentti; Tenhunen, Jussi; Kopola, Harri; Lehto, Ari

doi:10.1117/12.348309

Cited by 5 publications

(5 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…1, the plate centre was taken as the origin of the coordinate (x, y). It was assumed that the plates were fixed only at the spacer-positions, i.e., (9,9), (À9, 9), (À9, À9), and (9, À9). Corresponding to samples used in the current experiments (Section 4), an initial spacing h(x, y) before voltage application was assumed to be 6 lm over the entire area.…”

Section: Simulation For Electrostatic Deformationmentioning

confidence: 99%

“…Fabry-Pérot interferometers are therefore used extensively in various technical fields; e.g., diaphragm pressure sensors [1,2], optical communication devices [3][4][5], and laser oscillators [6]. While most experiments on these applications have been conducted in the visible or near-infrared regions, applications to mid-infrared measurements are also attracting interests recently [7][8][9][10], since high-speed, compact, inexpensive spectrometers are required in such advanced infrared measurements as in situ spectrometry and multi-wavelength thermometry [11]. Until now various tuning methods have been proposed for Fabry-Pérot filters [12]; e.g., air compression in a cavity [13], electric reorientation of liquid crystal [4][5][6]14,15], piezoelectric mirror drive [3,7,8,15], and thermal bending of a cantilever [16].…”

Section: Introductionmentioning

confidence: 99%

“…Si plates are fixed in the four corners, i.e., at the positions (9, 9), (À9,9), (À9, À9), and (9, À9). When a voltage is applied, the plates deform to decrease the spacing h.…”

mentioning

confidence: 99%

See 2 more Smart Citations

Tunable infrared filter made of thin silicon wedges

Saito

Yamada

Mizuta

et al. 2008

Infrared Physics & Technology

View full text Add to dashboard Cite

Section: Simulation For Electrostatic Deformationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Tunable infrared filter made of thin silicon wedges

Saito

Yamada

Mizuta

et al. 2008

Infrared Physics & Technology

View full text Add to dashboard Cite

“…Similarly, Vail et al reported a GaAs micromachined widely tunable Fabry-Perot filter for use in a WDM system. 13,14 In previous work toward Fabry-Perot systems for the infrared range, limited examples of working systems have been reported. 9 These devices have generated great interest due to the ease of operation, single moving parts with small displacements, and small-dimension planar designs compared to prisms or grating systems.…”

Section: Introductionmentioning

confidence: 99%

Bulk micromachining of a MEMS tunable Fabry-Perot interferometer: effect of residual silicon on device performance

Srivastava

Shenoy

Forrest

et al. 2004

J. Micro/Nanolith. MEMS MOEMS

View full text Add to dashboard Cite

A broadband tunable filter for the infrared spectral region is desired for use as a wavelength selective element in a miniature absorption spectrometer. We present the design, fabrication, packaging, and characterization of a bulk micromachined Fabry-Perot interferometer (FPI) for meeting this need. A novel approach to fabricate a MEMSbased tunable resonant cavity using two separate wafers bonded using a ''lock-and-key'' spacer design is outlined, with the goal of realizing electrostatically actuated membranes from films predeposited on base substrates. This ability could enable the pursuit of MEMS devices without in-house chemical vapor deposition (CVD) capability, after overcoming the shortcomings of bulk micromachining. The FPI device was designed with a planar structure comprising two face-to-face bonded chips of overall lateral dimension 10ϫ10 mm with deflection regions of 2ϫ2 mm. The device employs electrostatic actuation to tune the output wavelength, for which finite element modeling predicted low (Ͻ1 V) actuation voltages for movement of the membrane. Experimental results from device testing (mechanical) were found to differ from the theoretical predictions, primarily due to fabrication issues. Specifically, the device performance was found to be greatly influenced by the amount of residual silicon on the wafer chip following inductively coupled plasma (ICP) backside etching, with high voltages (ϳ30 times higher than modeled) required for actuation of the device. Through a combination of modeling and experimental measurements, it is demonstrated that the ability to produce MEMS devices by releasing membranes from films predeposited on substrates is highly susceptible to error in etching and packaging.

show abstract

“…The combination of the Raman spectrometer and confocal imager offers a remote sensing method for the detection of organic material (Dickensheets & Kino 1998). The Raman spectrometer cannot detect water readily but the integration of an infrared spectrometer with the same optics provides this capability (Keraven et al 1999). The CMaRS can be switched to a role as an infrared spectrometer to find water and may be readily incorporated into the instrument assembly and the same optical chain (Dickensheets D. 2001 private communication).…”

Section: Gestation and Birth Of A Robotic Astrobiology Mission Proposmentioning

confidence: 99%

Astrobiological instrumentation for Mars – the only way is down

Ellery¹,

Kolb²,

Lämmer³

et al. 2002

International Journal of Astrobiology

View full text Add to dashboard Cite

: In this paper, in this edition of the Journal commemorating the life and work of David Wynn-Williams, we consider approaches to the astrobiological investigation of Mars. We provide a brief account of the scientific rationale behind the approach presented here. In particular, we outline the capabilities of the Raman spectrometer for the detection of biomarkers. David Wynn-Williams was an active champion of this instrument who was keen to field-qualify a version in Antarctica with a view to flying a Raman instrument onboard a Mars-bound space mission. We examine a scenario for the deployment of such an instrument in conjunction with other instrumentation and argue that subsurface deployment of scientific instruments is essential if we are to succeed in detecting any evidence that may exist for former life on Mars. We outline a mission scenario -Vanguard -which represents a novel but low-risk, low-cost approach to Mars exploration that was conceived and developed jointly by one of the authors (Ellery) and the late David Wynn-Williams.

show abstract

<title>Main characteristics of a miniaturized multipurpose infrared spectrometer</title>

Cited by 5 publications

References 0 publications

Tunable infrared filter made of thin silicon wedges

Tunable infrared filter made of thin silicon wedges

Bulk micromachining of a MEMS tunable Fabry-Perot interferometer: effect of residual silicon on device performance

Astrobiological instrumentation for Mars – the only way is down

Contact Info

Product

Resources

About