&lt;title&gt;Performance of a biaxial MEMS-based scanner for microdisplay applications&lt;/title&gt;

Wine, David W.; Helsel, Mark P.; Jenkins, Lorne; Ürey, Hakan; Osborn, Thor D.

doi:10.1117/12.396487

Cited by 74 publications

(36 citation statements)

References 7 publications

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“…[54,60] These twoaxis scanners use electromagnetic actuation for the outer frame that provides the vertical or slow axis, and electrostatic actuation for the inner mirror axis that provides the horizontal or fast axis. The devices were bulk-micromachined using both wet and dry anisotropic etching, and electroplating was used to form electromagnetic coils on the outer frame.…”

Section: Scanning Mirrors With Magnetic and Electromagnetic Actuatorsmentioning

confidence: 99%

Free-Space Optical MEMS

Wu¹,

Patterson²

2006

Mems

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Section: Scanning Mirrors With Magnetic and Electromagnetic Actuatorsmentioning

confidence: 99%

Free-Space Optical MEMS

Wu¹,

Patterson²

2006

Mems

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“…The following equations represent the angular movement for a resonant horizontal scanner function and a slow linear vertical scan function: fH (t)= AHSin(21zfMt) (1) fV(t)=-2dfMt (2) where fM S the horizontal scanner frequency normalized to 1, AH is the center-to-edge width of half the screen, normalized to 1, d is Center-Screen vertical line spacing, and t is time.…”

Section: Raster Pinch Problemmentioning

confidence: 99%

<title>High-frequency raster pinch correction scanner for retinal scanning displays</title>

et al. 2001

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High-resolution (i.e., large pixel-count) and high frame rate dynamic microdisplays can be implemented by scanning a photon beam in a raster format across the viewer's retina. A resonant horizontal scanner and a linearly driven vertical scanner can create a 2-D raster for video display. The combined motion of the two scanners form a sinusoidal raster in the vertical direction and cause non-uniform line spacing for the case of bidirectional scanning as if the forward and return half-period raster lines are "pinched" near the edge of the display screen. 'Raster pinch" effect degrades the image quality, especially for multi-beam scanning systems. What is needed is a vertical scanner that creates a stairstep motion instead of linear motion. A third scanner can be added to the system to create an approximation to a staircase motion in the vertical axis and correct for the non-uniform raster spacing. The raster pinch scanner requirements, mechanical and magnetic designs with FEA analysis, and preliminary test results are discussed in this paper.

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“…The electrodes of the Micro Scanner devices are patterned comb-like what is not shown in Figure 1 and not taken into account in the considerations of this chapter. Analytically, the torsional oscillation of the mirror plate is described by the following equation of motion: (1) where φ is the mechanical deflection angle, δ is the damping factor, ω o is the characteristic frequency, M the driving torque and Θ the moment of inertia. It is assumed that the damping moment is proportional to the plates angular velocity.…”

Section: Mechanical Considerationsmentioning

confidence: 99%

<title>Design optimization of an electrostatically driven micro scanning mirror</title>

2001

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A design optimization of the electrostatically driven 1D Micro Scanning Mirror developed at the Fraunhofer Institute of Microelectronical Circuits and Systems has been carried out. The improvements are based on the use of non-Manhattan shaped structures for the mirror plate and the driving electrode combs. Several new design variants have been fabricated, characterized and are compared with devices of the previous design comprising quadratic mirror plates. The advantage of lower inertial moment favours the circular and elliptic design of the mirror plate. The capacity variation has been increased significantly by a special arrangement of the driving electrode fingers. Especially, a comb with star shaped fingers allows us to enhance the capacity variation remarkably.The experimental characterization of the devices shows that the elliptic plate with star shaped electrode combs is the variant to favour when the application requires large deflection angles for a given driving voltage and characteristic frequency. This meets the theoretical based expectation although the experimentally determined damping factor of devices with this design is significantly larger than for design variants with elliptic mirror plate and parallel electrode fingers. Devices of the novel design achieve mechanical deflection angles of up to ± 14.0° at a driving voltage of 11 V at low oscillation frequency. In comparison to the previous design this is an increase of 35 %.

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<title>Performance of a biaxial MEMS-based scanner for microdisplay applications</title>

Cited by 74 publications

References 7 publications

Free-Space Optical MEMS

Free-Space Optical MEMS

<title>High-frequency raster pinch correction scanner for retinal scanning displays</title>

<title>Design optimization of an electrostatically driven micro scanning mirror</title>

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