Magnetic films for electromagnetic actuation in MEMS switches

Hansen, Roana Melina de Oliveira; Safonovs, Romans; Adam, Jost; Chemnitz, Steffen; Reimer, Tim; Wagner, Bernhard; Benecke, W.; Mátéfi‐Tempfli, Stefan

doi:10.1007/s00542-017-3595-2

Cited by 24 publications

(15 citation statements)

References 13 publications

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“…In particular, a lot of effort have been made concerning dynamic investigations into the response of resonant microbeam [ 10 ] as much as micro-resonators [ 11 , 12 ]. This because they provide an excellent approximation of the human–machine interface in all the cases wherein miniaturized-integrated electromechanical systems are required [ 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 ]. Since the first batch device was produced in 1964 [ 22 ], the scientific and technological development in the field has strongly influenced the analysis and synthesis of physical-mathematical models that can describe the extremely complex underneath MEMS multi-physics [ 23 , 24 , 25 , 26 , 27 , 28 , 29 ].…”

Section: Introductionmentioning

confidence: 99%

A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

Versaci

Jannelli

Morabito

et al. 2021

Sensors

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In this study, an accurate analytic semi-linear elliptic differential model for a circular membrane MEMS device, which considers the effect of the fringing field on the membrane curvature recovering, is presented. A novel algebraic condition, related to the membrane electromechanical properties, able to govern the uniqueness of the solution, is also demonstrated. Numerical results for the membrane profile, obtained by using the Shooting techniques, the Keller–Box scheme, and the III/IV Stage Lobatto IIIa formulas, have been carried out, and their performances have been compared. The convergence conditions, and the possible presence of ghost solutions, have been evaluated and discussed. Finally, a practical criterion for choosing the membrane material as a function of the MEMS specific application is presented.

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Section: Introductionmentioning

confidence: 99%

A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

Versaci

Jannelli

Morabito

et al. 2021

Sensors

View full text Add to dashboard Cite

show abstract

“…This fact combined with constructive difficulties has limited magnetic actuation applications. However, there are successful application examples in the literature as it may exist in MEMS switches devices [ 7 ], Optical switches, and micro scanners [ 69 ], gyroscopes [ 107 ], or relays [ 108 ]. Many researches are also based on magnetic actuation [ 109 ].…”

Section: Actuation Techniquesmentioning

confidence: 99%

“…Overall MEMSCAP provides three standard procedures as a significant aspect of the MUMPs package: PolyMUMPs, described as a three-layer polysilicon surface microfabrication procedure, MetalMUMPs, that is an electroplated nickel procedure, and SOIMUMPs, presented in a silicon-on-insulator microfabrication procedure [ 24 ]. MEMS procedures have developed from the unique technologies of semiconductor device fabrication: deposition, patterning, and etching of material layers [ 7 , 25 ]. The steps of MUMPs fabrication technology are shown in the design handbook rule [ 24 ].…”

Section: Introductionmentioning

confidence: 99%

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

et al. 2021

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Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

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“…Furthermore, if the solution is not analytically obtainable, one can rely on numerical techniques that provide approximate solutions that, if they satisfy the aforementioned conditions of existence and uniqueness [11][12][13], do not represent ghost solutions [14][15][16][17][18]. The scientific community is currently working hard both on the analysis and synthesis of multiphysical models, and on technology transfer [19][20][21][22][23][24]. In such contexts, it is preferred to study MEMS devices equipped with symmetries in order to obtain models that can be studied more easily, both mathematically and physically [12].…”

Section: Introductionmentioning

confidence: 99%

A 2D Membrane MEMS Device Model with Fringing Field: Curvature-Dependent Electrostatic Field and Optimal Control

2021

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An important problem in membrane micro-electric-mechanical-system (MEMS) modeling is the fringing-field phenomenon, of which the main effect consists of force-line deformation of electrostatic field E near the edges of the plates, producing the anomalous deformation of the membrane when external voltage V is applied. In the framework of a 2D circular membrane MEMS, representing the fringing-field effect depending on ?|∇u|2 with the u profile of the membrane, and since strong E produces strong deformation of the membrane, we consider |E| proportional to the mean curvature of the membrane, obtaining a new nonlinear second-order differential model without explicit singularities. In this paper, the main purpose was the analytical study of this model, obtaining an algebraic condition ensuring the existence of at least one solution for it that depends on both the electromechanical properties of the material constituting the membrane and the positive parameter δ that weighs the terms ?|∇u|2. However, even if the the study of the model did not ensure the uniqueness of the solution, it made it possible to achieve the goal of finding a stable equilibrium position. Moreover, a range of admissible values of V were obtained in order, on the one hand, to win the mechanical inertia of the membrane and, on the other hand, to ensure that the membrane did not touch the upper disk of the device. Lastly, some optimal control conditions based on the variation of potential energy are presented and discussed.

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Magnetic films for electromagnetic actuation in MEMS switches

Cited by 24 publications

References 13 publications

A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

A 2D Membrane MEMS Device Model with Fringing Field: Curvature-Dependent Electrostatic Field and Optimal Control

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