Since the discovery of graphene,
the quest for two-dimensional
(2D) materials has intensified greatly. Recently, a new family of
2D transition metal carbides and carbonitrides (MXenes) was discovered
that is both conducting and hydrophilic, an uncommon combination.
To date MXenes have been produced as powders, flakes, and colloidal
solutions. Herein, we report on the fabrication of ∼1 ×
1 cm2 Ti3C2 films by selective etching
of Al, from sputter-deposited epitaxial Ti3AlC2 films, in aqueous HF or NH4HF2. Films that
were about 19 nm thick, etched with NH4HF2,
transmit ∼90% of the light in the visible-to-infrared range
and exhibit metallic conductivity down to ∼100 K. Below 100
K, the films’ resistivity increases with decreasing temperature
and they exhibit negative magnetoresistance—both observations
consistent with a weak localization phenomenon characteristic of many
2D defective solids. This advance opens the door for the use of MXenes
in electronic, photonic, and sensing applications.