2003
DOI: 10.1016/s0257-8972(02)00561-3
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Magnetron sputtering of nanocomposite (Ti,Cr)CN/DLC coatings

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Cited by 116 publications
(39 citation statements)
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“…This method is used generally for producing of the I/I nanocomposite coating [41][42][43][44][45][92][93][94][95][96][97], which includes the inorganic matrices and inorganic nanoparticles. For these coatings, PVD method includes the following: laser ablation [98], thermal evaporation [99], ion beam deposition [100], ion implantation [101,102], laser-assisted deposition [103], and atom beam cosputtering technique.…”
Section: Pvd Methodmentioning
confidence: 99%
See 1 more Smart Citation
“…This method is used generally for producing of the I/I nanocomposite coating [41][42][43][44][45][92][93][94][95][96][97], which includes the inorganic matrices and inorganic nanoparticles. For these coatings, PVD method includes the following: laser ablation [98], thermal evaporation [99], ion beam deposition [100], ion implantation [101,102], laser-assisted deposition [103], and atom beam cosputtering technique.…”
Section: Pvd Methodmentioning
confidence: 99%
“…The second way is to embed nanocrystalline phases in an amorphous phase matrix [87,93,168]. In this direction, the promising candidates for the amorphous matrix are the diamond-like carbon (DLC), amorphous carbon nitride, or other hard amorphous materials.…”
Section: Hardnessmentioning
confidence: 99%
“…Co-sputtering from single element targets allows independent regulation of each source thus enabling adjustment of 4 chemical stoichiometry of the coating. A wide range of nanocomposites has been synthesized using the sputtering method [52][53][54][55][56][57][58][59][60][61][62][63][64][65][66].…”
Section: Magnetron Sputteringmentioning
confidence: 99%
“…On the other hand, high compressive stress is commonly observed in coatings deposited by magnetron sputtering at low pressures where it typically reaches 4-6 GPa and higher (e.g., [66][67][68][69][70][71][72]). Specifically, this stress is often responsible for the high hardness and therefore the hardness can decrease during annealing due to stress relaxation.…”
Section: Magnetron Sputteringmentioning
confidence: 99%
“…Diamond-like carbon (DLC) film has many attractive properties, such as high hardness, high wear resistance, high corrosion resistance, low friction coefficient, chemical inertness to both acids and alkalis and lack of magnetic response [1][2][3][4][5]. In past years, DLC films have been extensively used for tribological application in many areas, such as mechanical parts, optical devices, magnetic storage disks and biomedical parts [6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%