2019
DOI: 10.1109/jmems.2018.2878320
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Manipulation of Liquid Metal Inside an SEM by Taking Advantage of Electromigration

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Cited by 11 publications
(16 citation statements)
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“…The liquid metal droplets are produced via an electromigration process [26] during which drops of an alloy with a mass ratio of 68.5% Ga, 21.5% In, and 10% Sn (equivalent to Galinstan©) are grown at the apex of an electrochemically etched and FIB-customized tungsten tip (end effector), which is electrically connected to a source measurement unit (SMU, Keysight B2901A) and mechanically mounted to the nanomanipulation setup. For growth of the liquid metal droplet, an electrostatic potential between the substrate and the tip is applied by the SMU.…”
Section: Methodsmentioning
confidence: 99%
“…The liquid metal droplets are produced via an electromigration process [26] during which drops of an alloy with a mass ratio of 68.5% Ga, 21.5% In, and 10% Sn (equivalent to Galinstan©) are grown at the apex of an electrochemically etched and FIB-customized tungsten tip (end effector), which is electrically connected to a source measurement unit (SMU, Keysight B2901A) and mechanically mounted to the nanomanipulation setup. For growth of the liquid metal droplet, an electrostatic potential between the substrate and the tip is applied by the SMU.…”
Section: Methodsmentioning
confidence: 99%
“…This allows the liquid metal to be forced to adhere to a manipulator. Forces utilized for this are van-der-Waals (Guo et al, 2020), capillary (Cumby et al, 2012) and electrostatic forces (Kleist-Retzow von et al, 2019b). However, the use of these techniques makes targeted wetting or structuring of the liquid metal virtually impossible.…”
Section: Fabrication Techniquesmentioning
confidence: 99%
“…contact angle measurements (see Figures 9A,D a) for which a liquid metal sphere that is as unaffected as possible is required. This implementation resulted in successful applications such as probes for contact angle measurements (Kleist-Retzow et al, 2020;Klauser et al, 2022), probes for gripping processes with adjustable adhesion (Kleist-Retzow von et al, 2019b) or probes for printing liquid metal volumes (see Figure 9C) (Kleist-Retzow von et al, 2019b).…”
Section: Probe Design and Applicationmentioning
confidence: 99%
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“…demonstrated formation and manipulation of >20 μm diameter Galinstan spheres inside a scanning electron microscope with a current density of 50 kAcm −2 in less than 10 min. [ 52 ] Michaud and Lacour [ 45 ] applied current densities from 5 − 100 Acm −2 to a liquid gallium‐solid gold interconnect and measured MTTFs from 10 2 to 10 −2 s, which they attributed to electromigration and the formation of Ga‐Au compounds. Similarly, Park et al.…”
Section: Figurementioning
confidence: 99%