Stepping motion principle has been widely applied for piezoelectric actuators. A stepping-motion actuator driven by a compliant mechanism is proposed in this paper. Two degrees of freedom exist in the compliant mechanism, which offer the possibility for multiple actuation modes including stick-slip mode, semi-inchworm mode, and pseudo-ultrasonic mode. Actuation trajectories are planned according to the geometric model of the compliant mechanism and proven efficient. The dynamic characteristics of the compliant mechanism is concerned and its modal finite element analysis is performed. The performances of the actuation modes are verified in experiments. A brief verification of angular stick-slip mode, which improves the output force by 155.3% compared to stick-slip mode, is carried out. An actuation frequency up to 1.4 kHz is achieved by the prototype. The highest output force and the highest output speed of the prototype are 2.35 N and 3.75 mm s−1, respectively.
We report memristive device characterization using near-field scanning microwave microscopy. Atomic force microscopy, magnitude and phase-shift images of the complex reflection coefficient of TiO2 devices can be acquired simultaneously in the range 1-20 GHz. In particular, measurement of the complex reflection coefficient of a 200 by 200 nm 2 TiO2 device is exemplary demonstrated. These results are beneficial for electrical modeling and optimization of memristor devices to address OxRAM applications.
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