Manufacturing process for interconnected submodules of hydrogenated amorphous silicon photovoltaic panels

Abstract

Large scale deposition of hydrogenated amorphous silicon (a-Si) for photovoltaic panels is discussed. The ‘‘box carrier’’ concept is introduced for hydrogenated a-Si deposition. The spectral response studies prove that cross contamination is not present. Using this new concept, the average of 72 panels in one run is 5.6%. An I-V curve for a square foot panel with an efficiency of 7.2% is shown. The utilization efficiency of silane is much higher (61%) than what has previously been reported (8%).