Mass Spectrometer Study of Silicon Tetra-Fluoride

Rummel, R. E.; Sites, J. R.; Baldock, R.

doi:10.2172/4393563

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Ion Emission From the Il1

Micro Emitter Array1

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2013

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(2 citation statements)

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“…Figure 6 shows a mass spectrum when exposing the silicon wafer putting on the faraday cup to the emitted ion beam. All peaks which indicate volatilization of silicon fluoride could be observed successfully [7].…”

Section: Ion Emission From the Ilmentioning

confidence: 90%

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Ionic-liquid micro ion source array for flexyble concurrent MEMS process

Suzuki

Hara

Oguchi

et al. 2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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This paper reported a micro ion source array for flexible concurrent fabrication of micro devices.In this study, to simplify and facilitate to integrate the ion sources with high density, ionic liquid (IL) 1-ethyl-3-methl imidazolium tetrafluoroborate ([EMIM]-[BF 4 ]) was applied to the source material of ions. A reservoir for this IL was integrated to the micro emitter array using silicon micromachining.As experimental results, emitting of the ion from the [EMIM]- [BF 4 ] and volatilization of silicon fluoride when exposing the silicon wafer to the emitted ion could be confirmed.

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Section: Ion Emission From the Ilmentioning

confidence: 90%

“…Figure 9 shows mass spectrum when the cover glass was changed to silicon substrate. A peak with mass number of 85, which indicates the volatilization of SiF 3 + [7], was obtained. However, other peaks could not be observed significantly.…”

Section: Micro Emitter Arraymentioning

confidence: 99%