Material removal model for AFM-based nanochannel fabrication

Wang, Z.Q.; Dong, Zaili

doi:10.1016/j.wear.2012.01.005

Cited by 13 publications

(9 citation statements)

References 8 publications

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“…Generally, the normal load is considered as the product of the sample yield stress and the horizontal projected area of the tip-sample interface [14][15][16]28]. Based on the horizontal projected area in Fig.…”

Section: The Indentation Testmentioning

confidence: 99%

“…Recently, some researchers focus on the theoretical modeling of scratching depth. Wang studied the relationship between the initial and final nanochannel depth through both theoretically and experimentally [14,15]. Geng modeled the scratching depth theoretically in both single and multiple scratching, and micro/nano structures were manufactured based on the proposed model [16].…”

Section: Introductionmentioning

confidence: 99%

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Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5μm/s and feed 0.06μm, some more micro structures including stair, sinusoidal groove, Chinese character "田", "TJU" and Chinese panda have been fabricated on the silicon substrate.

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Section: The Indentation Testmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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“…A spherical capped conical tip model has been widely applied in the analysis of the tip-sample interface [10,11], which is shown in Fig. 1, where R 0 is the spherical cap radius and δ is the half angle.…”

Section: Geometrical Modelmentioning

confidence: 99%

“…According to the tip geometry, they can be mainly categorized into spherical tips [8][9][10], conical tips [11,12] and pyramidal tips [13][14][15]. The spherical tip is usually with a diameter in the micron scale, which is not appropriate for the nanochannel fabrication.…”

Section: Introductionmentioning

confidence: 99%

Modeling and simulation of the probe tip based nanochannel scratching

Guo

Tian

Liu

et al. 2017

Precision Engineering

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Copies of full items can be used for personal research or study, educational, or not-for-profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP URL' above for details on accessing the published version and note that access may require a subscription. AbstractThis paper presents the theoretical modeling and numerical simulation of the probe tip based nanochannel scratching. According to the scratching depth, the probe tip is modeled as a spherical capped conical tip or a spherical capped regular three side pyramid tip to calculate the normal force needed for the nanochannel scratching.In order to further investigate the impact of scratching speed, scratching depth and scratching direction on the scratching process, the scratching simulation is implemented in LS-DYNA software, and a mesh-less method called smooth particle hydrodynamics (SPH) is used for the sample construction. Based on the theoretical and simulated analyses, the increase of the scratching speed, the scratching depth and the face angle will result in an increase in the normal force. At the same scratching depth, the normal forces of the spherical capped regular three side pyramid tip model are different in different scratching directions, which are in agreement with the theoretical calculations in the d 3 and d 4 directions. Moreover, the errors between the theoretical and simulated normal forces increase as the face angle increases.

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“…Considering the optimization of fabrication methods for precise dimensional control and cost-effectiveness, scanning-probe lithography, which mainly refers to the use of the scanning tunneling microscope and atomic force microscope (AFM) [24][25][26][27][28][29][30] as 'lithographic' tools, is an emerging area in the field of nanofabrication. For example, the diamond tip of a cantilever installed in an AFM is used to mechanically pattern nanoscale features on the surfaces of substrates, such as silicon and metals.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography

Lin

Zhan

et al. 2017

Microsyst Nanoeng

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In this paper, we describe a novel and simple process for the fabrication of all-transparent and encapsulated polymeric nanofluidic devices using nano-indentation lithography. First, a nanomechanical probe is used to 'scratch' nanoscale channels on polymethylmethacrylate (PMMA) substrates with sufficiently high hardness. Next, polydimethylsiloxane (PDMS) is used twice to duplicate the nanochannels onto PDMS substrates from the 'nano-scratched' PMMA substrates. A number of experiments are conducted to explore the relationships between the nano-indentation parameters and the nanochannel dimensions and to control the aspect ratio of the fabricated nanochannels. In addition, traditional photolithography combined with soft lithography is employed to fabricate microchannels on another PDMS 'cap' substrate. After manually aligning the substrates, all uncovered channels on two separate PDMS substrates are bonded to achieve a sealed and transparent nanofluidic device, which makes the dimensional transition from microscale to nanoscale feasible. The smallest dimensions of the achievable nanochannels that we have demonstrated thus far are of~20 nm depth and~800 nm width, with lengths extendable beyond 100 μm. Fluid flow experiments are performed to verify the reliability of the device. Two types of colloidal solution are used to visualize the fluid flow through the nanochannels, that is, ethanol is mixed with gold colloid or fluorescent dye (fluorescein isothiocyanate), and the flow rate and filling time of liquid in the nanochannels are estimated based on time-lapsed image data. The simplicity of the fabrication process, bio-compatibility of the polymer substrates, and optical transparency of the nanochannels for flow visualization are key characteristics of this approach that will be very useful for nanofluidic and biomolecular research applications in the future. INTRODUCTIONThe field of nanofluidics is widely known as the research and application of the behaviors of liquid flow in a specific area that is confined to the nanoscale 1 . A significant research interest has risen in this field due to the unique nanofluidic phenomena and flow properties that are markedly different from those in the welldeveloped microfluidics field. For example, since the dimensions of typical nanochannels are comparable to those of biomolecules, such as proteins and DNAs, they may be used for the transportation of selective molecules and DNA stretching. Furthermore, similar to microchannels, the surface-to-volume ratio of nanochannel structures is ultra-high, which leads to a diffusionlimited reaction 2 and negative water pressure induced by capillarity 3 . Moreover, because the size of the electrical double layer formed by strong electrostatic interactions between ions and the charged surface is in the range of 1 − 100 nm (Refs. 4,5), nanoflows in nanochannels will have flow properties that significantly deviate from Newtonian fluids. Based on these novel dimensional effects, many significant applications have been explored over the past ...

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Material removal model for AFM-based nanochannel fabrication

Cited by 13 publications

References 8 publications

Experimental investigation of the tip based micro/nano machining

Experimental investigation of the tip based micro/nano machining

Modeling and simulation of the probe tip based nanochannel scratching

Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography

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