1994
DOI: 10.1063/1.357693
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Measurement of piezoelectric coefficients of ferroelectric thin films

Abstract: This article presents measurements of piezoelectric coefficients of lead zirconate titanate (PZT) thin films. The normal load method is used to measure the coefficients for PZT films with various compositions prepared by the sol-gel technique or by organometallic chemical vapor deposition (OMCVD). The as-deposited OMCVD films have a piezoelectric coefficient of 20–40×10−12 m/V, whereas the unpoled sol-gel films are not piezoelectric. After poling the thin films having a composition near the morphotropic phase … Show more

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Cited by 512 publications
(261 citation statements)
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“…Previous methods for d 33 measurement [10] have proven to be less suitable given the high number of samples measured and therefore the piezometer is ideal. The limitations in this method of measurement result from the substrate clamping effects, which reduce the effective d 33 coefficient thereby reducing the effective d 33 [11].…”
Section: Polingmentioning
confidence: 99%
“…Previous methods for d 33 measurement [10] have proven to be less suitable given the high number of samples measured and therefore the piezometer is ideal. The limitations in this method of measurement result from the substrate clamping effects, which reduce the effective d 33 coefficient thereby reducing the effective d 33 [11].…”
Section: Polingmentioning
confidence: 99%
“…Therefore, the measured piezoelectric response represents an effective coefficient. 13 Fig. 1, with a resolution of 10 Ϫ3 nm or better.…”
Section: A Piezoelectric Measurementsmentioning
confidence: 99%
“…7 Multiferroic materials have drawn an increasing amount of interest due to their capability of efficient energy transfer between electric energy and magnetic energy and their potential applications in many multifunctional devices. [8][9][10][11][12][13] Several synthesis methods have been developed for multiferroic composite materials in the bulk form, such as eutectic unidirectional solidification, 14 ceramic sintering, 15 glue bonded laminates, [16][17][18][19][20] tape casting, 21 and hot molding; 22 and in the film form, such as pulsed laser deposition, 11,23,24 physical vapor deposition, 25 and sol-gel process. [5][6][7] However, the preparation of one dimensional composite multiferroic nanostructures with both magnetic and ferroelectric phases, for example, magnetic core and ferroelectric shell nanowires, remains an open challenge.…”
mentioning
confidence: 99%