2020
DOI: 10.1016/j.diamond.2020.108094
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Mechanical properties of high-crystalline diamond films grown via laser MPCVD

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Cited by 11 publications
(4 citation statements)
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“…Optimized diamond growth is achieved at 20% CH 4 gas mixture as judged from the fingerprint diamond peak at 1332 cm −1 with a small FWHM (Full width at half maximum) value of ~25 cm −1 in the Raman spectrum. [ 8 ] Using this condition, we grew a ~30 nm thick NCD film that is characterized by highly crystalline columnar grains, and the presence of an 1 nm thick amorphous carbon layer at the diamond/silicon interface (Figure 2c,d and Figure S1d–f, Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
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“…Optimized diamond growth is achieved at 20% CH 4 gas mixture as judged from the fingerprint diamond peak at 1332 cm −1 with a small FWHM (Full width at half maximum) value of ~25 cm −1 in the Raman spectrum. [ 8 ] Using this condition, we grew a ~30 nm thick NCD film that is characterized by highly crystalline columnar grains, and the presence of an 1 nm thick amorphous carbon layer at the diamond/silicon interface (Figure 2c,d and Figure S1d–f, Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
“…The gamut of diamond metasurfaces achieved here surpasses that of metallic metasurface (45% of sRGB) [ 20 ] but is slightly lower than that of conventional Si metasurfaces (~75% of sRGB). [ 8 ] At this stage, there is still plenty of room to improve the color saturation by improving the refractive index and configuration of the diamond unit cell.…”
Section: Resultsmentioning
confidence: 99%
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“…3,4) Despite that, controlling the sp 3 /sp 2 ratio could pave new opportunities for advanced multifunctional Q-dia biomaterials. Several methods have been employed to increase the sp 3 -C bonded fraction [5][6][7][8] in the Q-dia films, among them, negative bias-enhanced nucleation-bias-enhanced growth (BEN-BEG) has emerged as a cutting-edge technique for its exceptional capability to strengthen the mechanical and structural properties of Q-dia films. In this method, reactive species from the plasma are attracted to the negatively-biased substrate holder, becoming sub-implanted beneath the substrate's surface where they synergistically interact to form an interfacial carbide layer.…”
mentioning
confidence: 99%