Mechanical properties of TaN-Cu nanocomposite thin films

Antibacterial and tribological properties of TaN–Cu, TaN–Ag, and TaN–(Ag,Cu) nanocomposite thin films

“…Further detailed procedures can be found in Refs. [11,12]. After deposition and annealing, the coating hardness and Young's modulus were measured using a load-controlled nano-indentation instrument (UMIS 2000) with a Berkovich indenter.…”

“…Recently, TaN-Cu and TaN-Ag nanocomposite films were deposited by reactive co-sputtering on tool steel substrates [11,12]. Following deposition, the films were annealed using RTA (Rapid Thermal Annealing) at 400 8C for various length of time to induce the emergence of Cu or Ag particles in films' matrix and on the surface.…”

Antibacteria and anti-wear TaN–(Ag,Cu) nanocomposite thin films deposited on polyether ether ketone

“…In the past, tantalum nitride thin films doped with soft metals (i.e., TaN-Cu, TaN-Ag, and TaN-(Ag,Cu)) have been prepared using a hybrid process that starts with reactive co-sputtering, which is followed by rapid thermal annealing (RTA) at a temperature higher than 350 o C [10][11][12].…”

Antibacterial properties of TaN–(Ag,Cu) nanocomposite thin films

“…Copper or silver, when used as a dopant, is proved immiscible with TaN, which makes the synthesis of TaNeCu or TaNeAg nanocomposite thin films possible [9]. Recently, TaNeCu and TaNeAg nanocomposite films were deposited by reactive cosputtering followed by rapid thermal annealing at 400 C for various length of time to induce the emergence of Cu or Ag particles in films' inner matrix and on the surface [10,11]. These studies confirmed that the improvement of mechanical property of the TaN-soft metal nanocomposite films was dependent on metal contents and annealing time.…”