MEMS-based flexible reflective analog modulators (FRAM) for projection displays: a technology review and scale-down study

Picard, Francis; Ilias, S.; Asselin, Daniel; Boucher, Marc-André; Duchesne, François; Jacob, Michel; Larouche, Carl; Vachon, Carl; Niall, Keith K.; Jerominek, Hubert

doi:10.1088/1742-6596/276/1/012182

Cited by 3 publications

(1 citation statement)

References 3 publications

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“…Micro-electro-mechanical systems (MEMS) are frequently found around us (e.g., a microaccelerometer in a car system and a micromirror in a projector system). [1][2][3][4][5][6][7] MEMS devices are produced through microfabrication processes based on photolithography. 8,9) Photolithography is one of the excellent techniques developed to produce integrated circuits (ICs).…”

Section: Introductionmentioning

confidence: 99%

Flow Analysis of Photoresist Spray Coating towards Improving Coverage on Three-Dimensional Structures

Kumagai¹,

Tajima²,

Sasaki³

2011

Jpn. J. Appl. Phys.

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Gas flow in photoresist spray coating is numerically analyzed to reveal the flow in the vicinity of a substrate with trench structures. With increasing Reynold's number, gas flows enter the trenches to deeper positions, forming vortexes. Compared with experimental results, it is shown that bump formations, which are frequently observed around the convex corner of the trench sidewall, are related to the position of the boundary between the flow ejected from the spray nozzle and the vortexes confined inside the trenches. Moving laterally away from the center axis of the nozzle, the lateral flow along the substrate surface becomes dominant in the vicinity of the substrate and, consequently, photoresist particles tend to deposit on top of the trenches.

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Section: Introductionmentioning

confidence: 99%

Flow Analysis of Photoresist Spray Coating towards Improving Coverage on Three-Dimensional Structures

Kumagai¹,

Tajima²,

Sasaki³

2011

Jpn. J. Appl. Phys.

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Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Chen¹,

Zhang²,

Hong³

et al. 2022

J. Semicond.

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Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced concisely, followed by research progress of advanced Si-based MOEMS devices, including micromirrors/micromirror arrays, micro-spectrometers, and optical/photonic switches. Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing, they have several promising applications in optical communications, digital light processing, and optical sensing. Finally, future research and development prospects of Si-based MOEMS are discussed.

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Flow Analysis of Photoresist Spray Coating towards Improving Coverage on Three-Dimensional Structures

Kumagai¹,

Tajima²,

Sasaki³

2011

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

MEMS-based flexible reflective analog modulators (FRAM) for projection displays: a technology review and scale-down study

Cited by 3 publications

References 3 publications

Flow Analysis of Photoresist Spray Coating towards Improving Coverage on Three-Dimensional Structures

Flow Analysis of Photoresist Spray Coating towards Improving Coverage on Three-Dimensional Structures

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Flow Analysis of Photoresist Spray Coating towards Improving Coverage on Three-Dimensional Structures

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