Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Chen, Shanshan; Zhang, Yongyue; Hong, Xiaobin; Li, Jiafang

doi:10.1088/1674-4926/43/8/081301

Cited by 19 publications

(8 citation statements)

References 78 publications

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“…It is noteworthy that the scalability and cost-effectiveness of the fabrication process are paramount for the practical deployment of PUF-based anti-counterfeiting labels. The processing techniques adopted in this work, such as nonthermal plasma synthesis 40 , 41 , wet etching 42 – 44 , drop casting 45 , and spin coating 46 , 47 have already been widely used in the CMOS industry. This means that our fabrication process could be readily carried out based on the existing CMOS manufacturing infrastructure, which is crucial for large-scale production.…”

Section: Resultsmentioning

confidence: 99%

All-silicon multidimensionally-encoded optical physical unclonable functions for integrated circuit anti-counterfeiting

Wang,

Shi,

Lai

et al. 2024

Nat Commun

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Integrated circuit anti-counterfeiting based on optical physical unclonable functions (PUFs) plays a crucial role in guaranteeing secure identification and authentication for Internet of Things (IoT) devices. While considerable efforts have been devoted to exploring optical PUFs, two critical challenges remain: incompatibility with the complementary metal-oxide-semiconductor (CMOS) technology and limited information entropy. Here, we demonstrate all-silicon multidimensionally-encoded optical PUFs fabricated by integrating silicon (Si) metasurface and erbium-doped Si quantum dots (Er-Si QDs) with a CMOS-compatible procedure. Five in-situ optical responses have been manifested within a single pixel, rendering an ultrahigh information entropy of 2.32 bits/pixel. The position-dependent optical responses originate from the position-dependent radiation field and Purcell effect. Our evaluation highlights their potential in IoT security through advanced metrics like bit uniformity, similarity, intra- and inter-Hamming distance, false-acceptance and rejection rates, and encoding capacity. We finally demonstrate the implementation of efficient lightweight mutual authentication protocols for IoT applications by using the all-Si multidimensionally-encoded optical PUFs.

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Section: Resultsmentioning

confidence: 99%

All-silicon multidimensionally-encoded optical physical unclonable functions for integrated circuit anti-counterfeiting

Wang,

Shi,

Lai

et al. 2024

Nat Commun

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“…Micro-Opto-Electro-Mechanical Systems (MOEMS), at the convergence of micro-optics, optoelectronics, optomechanics, and MEMS [1] , represent a forefront research area in the contemporary scientific landscape. Flexible modulation of light transmission properties is achieved by arranging molecules into nano-superstructures at either wavelength or sub-wavelength scales.…”

Section: Introductionmentioning

confidence: 99%

Programmable chiral liquid crystal elastomer with broadband tunability

Zhang,

Yang

et al. 2024

Advanced Fiber Laser Conference (AFL2023)

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Chiral liquid crystal elastomers amalgamate the micro-optical features of self-assembled nanostructures with their supermechanical attributes, providing repeatable stimulus responsivity, which has a wide range of applications in MOEMS. This study presents a programmable chiral liquid crystal elastomer (CLCE) with broadband tunability. Stretching induces a blue shift in the wavelength of the reflection center of CLCEs. Upon stress relief, the elastomer can revert to its initial color. Significant structural color changes within the visible range, spanning over 200 nm in wavelength, are achieved. Control over the initial color of CLCEs is achieved by adjusting the chiral dopant concentration, establishing a relationship between the initial reflection center wavelength and the chiral dopant concentration, shifting from red at 1.9 wt.% to blue at 2.9 wt.%.

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“…The development of very small size and low-cost spectrometers for the infrared wavelength range that are suitable for a great variety of use cases is in the focus of many publications [1][2][3][4]. Modular approaches with the integration of components like waveguides, bends and couplers on one single chip are reported [5,6].…”

Section: Introductionmentioning

confidence: 99%

Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths

Wecker

Hiller

Großmann

et al. 2023

Silicon Photonics XVIII

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As part of a future optical platform on-chip, we present a waveguide integrated tunable Fabry-Pérot Interferometer (FPI) for the long infrared wavelength range. The FPI consists of two parallel Bragg reflectors that are located at the ends of two waveguides facing each other. The waveguides are made of silicon and are suspended in air. The reflectors are realized as an alternating stack of silicon and air layers with high (H) and low (L) refractive index. The filter transmittance is evaluated by analytic calculations and electromagnetic finite difference time domain simulations. Filters with (HL)² layer stack show a full width half maximum of 270 nm and a peak transmittance of more than 25% at a wavelength of 9.4 µm at the first interference order in the simulation. It is evaluated by measurements.A MEMS actuator is used to tune the filter wavelength by changing the distance between both reflectors. A digital electrostatic actuator concept with a linear drive characteristic, designed for a large travel range up to 4 µm with a driving voltage of less than 30 V, is presented and evaluated together with the filter.The MEMS fabrication process for the structures is based on bonding and deep reactive ion etching (DRIE). The DRIE etch process was optimized, hereafter achieving a reduced roughness of less than 3 nm of the waveguide sidewalls.For transmission measurements the silicon waveguides are coupled to a laser source and a detector using optical fibers together with optical couplers on the chip. The filter performance was characterized in the range from 9μm to 9.4 µm.

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Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Cited by 19 publications

References 78 publications

All-silicon multidimensionally-encoded optical physical unclonable functions for integrated circuit anti-counterfeiting

All-silicon multidimensionally-encoded optical physical unclonable functions for integrated circuit anti-counterfeiting

Programmable chiral liquid crystal elastomer with broadband tunability

Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths

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